{"id":"W2054157352","doi":"10.1117/12.2050538","title":"Microplasma fabrication: from semiconductor technology for 2D-chips and microfluidic channels to rapid prototyping and 3D-printing of microplasma devices","year":2014,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Plasma Applications and Diagnostics","field":"Medicine","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microplasma; Fabrication; Semiconductor device fabrication; Microfluidics; Materials science; Nanotechnology; Rapid prototyping; Semiconductor; 3D printing; Optoelectronics; Plasma; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000905142,0.0009330403,0.00073036,0.0017671,0.0006380581,0.001418325,0.001220321,0.0009629687,0.002700728],"category_scores_gemma":[0.0006477371,0.0009085776,0.000597595,0.001100433,0.001129059,0.00119253,0.00154816,0.001527038,0.002443512],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00102344,"about_ca_system_score_gemma":0.0008397276,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007925082,"about_ca_topic_score_gemma":0.001359866,"domain_scores_codex":[0.9992234,0.00007605089,0.00004276268,0.0001679048,0.0004232353,0.00006668027],"domain_scores_gemma":[0.999669,0.0001303769,0.00004195672,0.00005346699,0.00006629574,0.00003903318],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006913105,0.00007193588,0.0005142445,0.001931206,0.00003830065,0.0003601864,0.0003558451,0.001374341,0.7710981,0.01049549,0.003989439,0.2097018],"study_design_scores_gemma":[0.0000199383,0.0002785222,0.00190399,0.0002074951,0.00002697835,0.001983373,0.0001018685,0.004264481,0.7908233,0.006360909,0.1939338,0.00009540967],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.04765349,0.1995561,0.7117442,0.002553185,0.001427211,0.0006403553,0.001178332,0.004026072,0.03122102],"genre_scores_gemma":[0.1738459,0.1471533,0.6533349,0.001348829,0.0005554479,0.0006751431,0.001299329,0.0006087897,0.02117821],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002700728,"threshold_uncertainty_score":0.009034812,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01205498928946372,"score_gpt":0.2333749676353392,"score_spread":0.2213199783458755,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}