{"id":"W2055336952","doi":"10.1016/j.measurement.2008.07.004","title":"Metrology, static and dynamic characterization of microstructures using acousto-optic-modulated-stroboscopic-interferometry","year":2008,"lang":"en","type":"article","venue":"Measurement","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":7,"is_retracted":false,"has_abstract":false,"ca_institutions":"Concordia University","funders":"","keywords":"Metrology; Cantilever; Dynamic testing; Characterization (materials science); Surface metrology; Interferometry; Stroboscope; Dimensional metrology; Computer science; Microelectromechanical systems; Materials science; Mechanical engineering; Optics; Engineering; Structural engineering; Profilometer; Nanotechnology; Surface finish; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009761001,0.0001288256,0.0001918286,0.00008576956,0.0001140711,0.00001251126,0.00008611951,0.00003447318,0.00005426067],"category_scores_gemma":[0.000002354692,0.0001225435,0.00004124144,0.0001173455,0.0001008529,0.000053014,0.00003868514,0.00008061888,0.000001112577],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005478632,"about_ca_system_score_gemma":0.00003038903,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001009441,"about_ca_topic_score_gemma":0.000001562188,"domain_scores_codex":[0.99924,0.00002290204,0.0002459168,0.0001873745,0.000142534,0.0001612123],"domain_scores_gemma":[0.9995163,0.000004140419,0.000144829,0.0001836232,0.0001110484,0.00004002919],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000007183193,0.00004723097,0.01900939,0.0000199376,0.00004389227,2.358205e-7,0.00008379565,0.00003281413,0.9797806,0.0001369678,0.00000997898,0.0008279818],"study_design_scores_gemma":[0.0006061706,0.0001936992,0.08522699,0.00009885376,0.0001010455,0.00001156523,0.0001287659,0.00818943,0.9044523,0.000558794,0.0001519306,0.0002804736],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8779798,0.0000392294,0.121572,0.00003050818,0.00003730972,0.0002208212,0.00004827841,0.0000221534,0.000049959],"genre_scores_gemma":[0.9922035,0.000006143869,0.007666765,0.00001690571,0.00001863192,0.0000161566,0.00003618152,0.00001559951,0.00002007461],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1142238,"threshold_uncertainty_score":0.499718,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02278411677108342,"score_gpt":0.2651632409669043,"score_spread":0.2423791241958209,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}