{"id":"W2056090196","doi":"10.1088/0960-1317/16/11/n01","title":"Non-uniform residual stresses for parallel assembly of out-of-plane surface-micromachined structures","year":2006,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Surface micromachining; Residual stress; Deflection (physics); Cantilever; Stiffness; Materials science; Microelectromechanical systems; Residual; Neutral plane; Surface (topology); Structural engineering; Mechanical engineering; Composite material; Nanotechnology; Fabrication; Optics; Geometry; Engineering; Computer science; Physics; Mathematics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003873103,0.0004753554,0.0002651916,0.0002537673,0.0003952736,0.0003383362,0.0004653983,0.0002827796,0.000600165],"category_scores_gemma":[0.00059091,0.0004132389,0.0003150723,0.0001171298,0.0003878847,0.0004609768,0.0004736775,0.0007423002,0.000253366],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002711559,"about_ca_system_score_gemma":0.0003452086,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002324134,"about_ca_topic_score_gemma":0.0009502491,"domain_scores_codex":[0.999526,0.00004429637,0.00003447174,0.00007070673,0.0002884234,0.00003610675],"domain_scores_gemma":[0.9995642,0.0001183216,0.00009320996,0.0001160683,0.00008038282,0.0000277723],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004130662,0.00003507426,0.000283243,0.00009239983,0.00001404299,0.0001127466,0.0001510484,0.01114477,0.9605417,0.006083719,0.0001519557,0.02134793],"study_design_scores_gemma":[0.00002562461,0.0002842793,0.000609257,0.00001204702,0.00001797529,0.0002584379,0.00003556886,0.1439867,0.8466789,0.001953231,0.006106793,0.00003119683],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2308785,0.0006111395,0.7645255,0.0001038047,0.0001789733,0.00007665681,0.00003236938,0.0006412091,0.002951868],"genre_scores_gemma":[0.5160059,0.000389145,0.4802863,0.00003508744,0.00004482709,0.00009833564,0.00007881148,0.0001592888,0.002902182],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.000600165,"threshold_uncertainty_score":0.002048314,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006758770294166329,"score_gpt":0.2132773218751587,"score_spread":0.2065185515809923,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}