{"id":"W2056202821","doi":"10.1007/s11671-010-9540-2","title":"Mold Fabrication for 3D Dual Damascene Imprinting","year":2010,"lang":"en","type":"article","venue":"Nanoscale Research Letters","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Nanoimprint lithography; Materials science; Resist; Fabrication; Interconnection; Copper interconnect; Lithography; Nanotechnology; Stack (abstract data type); Optoelectronics; Nanolithography; Photoresist; Layer (electronics); Computer science; Telecommunications","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0009853547,0.0001180273,0.0001198783,0.0004038909,0.000175364,0.0000869299,0.0002751039,0.0001170857,0.00005335351],"category_scores_gemma":[0.0002065415,0.0001213367,0.00008603425,0.0005565808,0.000111523,0.0001494812,0.00005003152,0.000534608,0.00002985141],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004222809,"about_ca_system_score_gemma":0.0000167031,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002633357,"about_ca_topic_score_gemma":0.000007468351,"domain_scores_codex":[0.9986151,0.00004436432,0.0002114408,0.0002501124,0.0003702018,0.0005087075],"domain_scores_gemma":[0.9990333,0.0002130645,0.00002326255,0.0004062842,0.0002011143,0.0001229168],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004454523,0.00001909957,0.001415027,0.00004722986,0.00001164069,8.823098e-7,0.00005563191,0.000007735976,0.9389825,0.0008079825,0.02512161,0.03352614],"study_design_scores_gemma":[0.0005171869,0.00005838622,0.02055925,0.00003025403,0.000009325589,0.00000744762,0.00003149167,0.01983645,0.5330086,0.0003328949,0.4252026,0.0004061065],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.836527,0.00009836058,0.1500592,0.004115136,0.0006996522,0.001382275,0.00003121112,0.001528986,0.005558204],"genre_scores_gemma":[0.9334837,0.00003574675,0.06526385,0.000186371,0.000395191,0.0004232666,0.00002498183,0.00005133876,0.0001355046],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.405974,"threshold_uncertainty_score":0.4947966,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02584941193640903,"score_gpt":0.3175247025132497,"score_spread":0.2916752905768407,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}