{"id":"W2057185012","doi":"10.1116/1.3628593","title":"Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process","year":2011,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Université de Sherbrooke","funders":"","keywords":"Etching (microfabrication); Materials science; Inductively coupled plasma; Silicon nitride; Silicon; Nitride; Plasma etching; Fabrication; Dry etching; Reactive-ion etching; Optoelectronics; Nanotechnology; Plasma; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002175455,0.0002617225,0.0002377064,0.0001299604,0.0001391659,0.0002108461,0.0003246648,0.0003704878,0.0008131574],"category_scores_gemma":[0.000220369,0.0001920115,0.0001975352,0.000130117,0.0001707052,0.0003660645,0.0002586709,0.0004100529,0.0004923595],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002237626,"about_ca_system_score_gemma":0.0002068031,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003976025,"about_ca_topic_score_gemma":0.0009376474,"domain_scores_codex":[0.9998081,0.00001269078,0.00001262085,0.00004714208,0.00009968717,0.0000197421],"domain_scores_gemma":[0.9999018,0.0000321111,0.00001968675,0.00001767415,0.00002310903,0.000005611601],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000743411,0.000008276062,0.00003640495,0.00004903257,0.00000215571,0.00003202401,0.00001892369,0.0001378685,0.9968497,0.0002092508,0.00004386156,0.00260496],"study_design_scores_gemma":[0.00000552582,0.00005315607,0.0002840894,0.000001998769,0.000003110774,0.0001003153,0.00000667832,0.0009987138,0.9959695,0.00005607651,0.002516592,0.000004258493],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7833465,0.003717704,0.1983548,0.0003583978,0.0002357621,0.0003427587,0.0007714874,0.0006871056,0.01218544],"genre_scores_gemma":[0.731158,0.002430468,0.2568633,0.00009819409,0.00002794155,0.000177861,0.0007532677,0.00009365073,0.008397316],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008131574,"threshold_uncertainty_score":0.002720296,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03170832271976552,"score_gpt":0.2366262282376512,"score_spread":0.2049179055178857,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}