{"id":"W2057213849","doi":"10.1109/cjece.2005.1541741","title":"Influence of micromachining on dynamic behaviour of mems structures","year":2005,"lang":"en","type":"article","venue":"Canadian Journal of Electrical and Computer Engineering","topic":"Composite Structure Analysis and Optimization","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"CMC Microsystems","keywords":"Surface micromachining; Microfabrication; Microsystem; Microelectromechanical systems; Microelectronics; Mechanical engineering; Materials science; Bulk micromachining; Field (mathematics); Computer science; Nanotechnology; Electronic engineering; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004109972,0.00009383942,0.0002112153,0.0003409986,0.0000169175,0.00001404418,0.0001013613,0.00004156754,0.000004274993],"category_scores_gemma":[0.00000792098,0.00008576295,0.00005702408,0.0001928547,0.00001067662,0.00006353181,0.00000432329,0.0001682558,7.641134e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005322274,"about_ca_system_score_gemma":0.00003095955,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007791137,"about_ca_topic_score_gemma":0.0001290923,"domain_scores_codex":[0.9994455,0.000004770109,0.0002867436,0.00005432005,0.00007560806,0.0001330593],"domain_scores_gemma":[0.9996431,0.00003272428,0.00006179348,0.0000571188,0.0000587514,0.0001464603],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000002028342,0.000001938464,0.001024737,0.00001307479,0.00004223008,0.000004915879,0.0001108656,0.9840941,0.005818055,0.0001586241,0.00001752712,0.008711937],"study_design_scores_gemma":[0.0001890253,0.0001425497,0.06620242,0.00005934299,0.00004364856,0.00008019966,0.000001611561,0.9273878,0.005538705,0.00002960386,0.0002009947,0.0001241097],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9686825,0.0009030771,0.03030626,0.00001397222,0.00005063865,0.00002017799,0.000002423169,0.000006262875,0.00001466005],"genre_scores_gemma":[0.9959828,0.00002843143,0.003893678,0.00001567175,0.00006742945,1.349369e-7,0.000001008603,0.000009899438,9.811218e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06517769,"threshold_uncertainty_score":0.3497311,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.001518250835291398,"score_gpt":0.161626170407651,"score_spread":0.1601079195723596,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}