{"id":"W2057348410","doi":"10.1117/12.591787","title":"Design and fabrication of giant micromirrors using electroplating-based technology","year":2005,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National d'Optique","funders":"","keywords":"Fabrication; Electroplating; Computer science; Materials science; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003146152,0.0004057341,0.0002977793,0.0001284192,0.0002063097,0.0003334243,0.0005940812,0.000426214,0.000445039],"category_scores_gemma":[0.0004065192,0.0003757354,0.000280157,0.0001069229,0.0003115833,0.0003250956,0.0002566763,0.00026815,0.0002603343],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003157336,"about_ca_system_score_gemma":0.000461305,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003009874,"about_ca_topic_score_gemma":0.0005560854,"domain_scores_codex":[0.9997421,0.00002824779,0.00001991707,0.00004931907,0.0001294066,0.00003098152],"domain_scores_gemma":[0.999838,0.00004045045,0.00004305616,0.00002956084,0.00003328513,0.00001573397],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003518869,0.00001005269,0.0002800222,0.0001009769,0.000008635423,0.0001484002,0.0000495217,0.003201767,0.9849864,0.0018015,0.0001681319,0.009209427],"study_design_scores_gemma":[0.00007810158,0.000730696,0.002139431,0.00001704857,0.00003151361,0.0009629566,0.00003791455,0.03769207,0.9435399,0.000713121,0.01402212,0.00003529845],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5768543,0.002330613,0.4089634,0.0002550959,0.0002608633,0.0004393042,0.000184776,0.001326581,0.009385198],"genre_scores_gemma":[0.6294621,0.0007488792,0.3670973,0.00004651899,0.00002881552,0.000163263,0.0001061209,0.00007488017,0.002272135],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005940812,"threshold_uncertainty_score":0.002290845,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01223588444879195,"score_gpt":0.2283506773997156,"score_spread":0.2161147929509237,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}