{"id":"W2057672192","doi":"10.1007/s10854-006-0026-z","title":"Raman scattering characterization of SF-PECVD-grown hydrogenated microcrystalline silicon thin films using growth surface electrical bias","year":2006,"lang":"en","type":"article","venue":"Journal of Materials Science Materials in Electronics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Toronto","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Materials science; Microcrystalline; Raman scattering; Microcrystalline silicon; Thin film; Raman spectroscopy; Chemical vapor deposition; Optoelectronics; Analytical Chemistry (journal); Silicon; Optics; Nanotechnology; Chemistry; Crystallography; Crystalline silicon; Amorphous silicon","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001718007,0.0002718725,0.000232351,0.0002035253,0.0002633784,0.0003025196,0.0003668724,0.0003812705,0.00124569],"category_scores_gemma":[0.0003279677,0.0002294734,0.000188462,0.0002192227,0.000217527,0.0002578222,0.0001564344,0.0002611039,0.0002297177],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003202073,"about_ca_system_score_gemma":0.0002139298,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002396625,"about_ca_topic_score_gemma":0.004376226,"domain_scores_codex":[0.9998592,0.000009471672,0.000007595707,0.00003156649,0.00006448253,0.00002767171],"domain_scores_gemma":[0.9997568,0.0001086783,0.00002913208,0.00002391253,0.000065849,0.00001566027],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004927939,0.000006489028,0.0002096585,0.00001688888,0.000004611373,0.00003084779,0.00003061362,0.00006971361,0.9988739,0.00003142391,0.00002953214,0.0006469829],"study_design_scores_gemma":[0.000004164492,0.00004644021,0.002312971,0.000001871632,0.000004668842,0.00003935985,0.0000342334,0.0009715876,0.9963824,0.00001119737,0.0001881857,0.000002956177],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9968885,0.0002596288,0.001423129,0.00005535728,0.00002072749,0.000008797302,0.0001726728,0.00003852212,0.001132783],"genre_scores_gemma":[0.9963869,0.0002079141,0.001825671,0.00001892096,0.000007439976,0.000009309918,0.0002096639,0.00001568944,0.001318383],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002396625,"threshold_uncertainty_score":0.004765391,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01172771872884158,"score_gpt":0.2130105759620582,"score_spread":0.2012828572332166,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}