{"id":"W2057672192","doi":"10.1007/s10854-006-0026-z","title":"Raman scattering characterization of SF-PECVD-grown hydrogenated microcrystalline silicon thin films using growth surface electrical bias","year":2006,"lang":"en","type":"article","venue":"Journal of Materials Science Materials in Electronics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Toronto","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Materials science; Microcrystalline; Raman scattering; Microcrystalline silicon; Thin film; Raman spectroscopy; Chemical vapor deposition; Optoelectronics; Analytical Chemistry (journal); Silicon; Optics; Nanotechnology; Chemistry; Crystallography; Crystalline silicon; Amorphous silicon","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.002365205,0.0003729722,0.0008921374,0.0007511554,0.0001051509,0.0002566648,0.0009173521,0.0002440643,0.00006060127],"category_scores_gemma":[0.0001401037,0.0003529057,0.0000792997,0.001156249,0.000319575,0.0008699888,0.00008284676,0.0002718089,0.000002921865],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006294615,"about_ca_system_score_gemma":0.000270033,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00008573722,"about_ca_topic_score_gemma":0.00001127081,"domain_scores_codex":[0.9962133,0.000138419,0.001840397,0.0003125039,0.000618661,0.0008767897],"domain_scores_gemma":[0.9984768,0.00004920055,0.0008180912,0.0002995099,0.0002886348,0.00006778154],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009675913,0.00007502361,0.0001909569,0.0001430304,0.00001723197,0.00001767522,0.00007141379,0.01961623,0.979503,0.0002334313,0.000007765256,0.00002746402],"study_design_scores_gemma":[0.00053278,0.0001955032,0.001575025,0.000183825,0.00003207526,0.0001913165,0.00002030893,0.002758648,0.9937161,0.0004492041,0.00002102539,0.0003241667],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9973983,0.0003625828,0.0007372942,0.00005097114,0.0009762527,0.0002540459,0.00005454987,0.0001563066,0.000009658788],"genre_scores_gemma":[0.9961047,0.0002811179,0.003401099,0.00001312935,0.0001117563,0.000002752297,0.00001618381,0.00006536901,0.000003949803],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01685758,"threshold_uncertainty_score":0.9998923,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01172771872884158,"score_gpt":0.2130105759620582,"score_spread":0.2012828572332166,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}