{"id":"W2057680014","doi":"10.1115/imece2008-68081","title":"A Linearly Tunable MEMS Capacitor With Segmented Electrode and Enhanced Structure","year":2008,"lang":"en","type":"article","venue":"Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University; University of Waterloo","funders":"","keywords":"Capacitor; Capacitance; Cantilever; Microelectromechanical systems; Stiffness; Materials science; Linearity; Voltage; Electrode; Node (physics); Electronic engineering; Optoelectronics; Structural engineering; Electrical engineering; Engineering; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001111531,0.0002299792,0.0002308705,0.0001612875,0.0002726293,0.0003818117,0.00113971,0.0008292245,0.001138505],"category_scores_gemma":[0.0002204596,0.0001530919,0.0001709738,0.0003246886,0.0002424262,0.000554689,0.0003535062,0.0002924945,0.000388539],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004454963,"about_ca_system_score_gemma":0.0003470684,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000754502,"about_ca_topic_score_gemma":0.001720846,"domain_scores_codex":[0.9998255,0.00001375978,0.000004792987,0.00003819643,0.00009121963,0.00002655157],"domain_scores_gemma":[0.9998903,0.00002276149,0.00001839457,0.00001202532,0.00003271728,0.00002390827],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004897121,0.000017604,0.0001081118,0.00006240517,0.00001195179,0.0002277222,0.00001796813,0.002059894,0.9883228,0.001013982,0.0004469436,0.007661618],"study_design_scores_gemma":[0.0001062708,0.0005624831,0.001689392,0.00001044355,0.00004863865,0.001205539,0.00003853035,0.08462857,0.8985701,0.0005407346,0.0125276,0.00007166353],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8190392,0.002726818,0.1540281,0.001443961,0.0004813907,0.0001106913,0.0004212495,0.001113502,0.02063508],"genre_scores_gemma":[0.9184219,0.0004139238,0.0742632,0.0002684123,0.00007695585,0.00003968191,0.0001247519,0.00003882713,0.006352246],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00113971,"threshold_uncertainty_score":0.003808677,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004519845598679709,"score_gpt":0.169636573805909,"score_spread":0.1651167282072293,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}