{"id":"W2057943869","doi":"10.1116/1.4906827","title":"Fabrication of long-range surface plasmon hydrogen sensors on Cytop membranes integrating grating couplers","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Plasmonic and Surface Plasmon Research","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Ottawa; Carleton University","funders":"","keywords":"Materials science; Photolithography; Optoelectronics; Grating; Electron-beam lithography; Fabrication; Wafer; Optics; Plasmon; Lithography; Surface plasmon polariton; Surface plasmon; Etching (microfabrication); Nanotechnology; Resist","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002745882,0.0003326576,0.0002636306,0.0001724689,0.000166305,0.0002898808,0.0004823283,0.0003944846,0.0005103846],"category_scores_gemma":[0.0003182045,0.0003458965,0.0002374364,0.0001581915,0.0002237907,0.0002637375,0.0003397956,0.0004731062,0.0005569219],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003109755,"about_ca_system_score_gemma":0.0001895355,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003535119,"about_ca_topic_score_gemma":0.0008092021,"domain_scores_codex":[0.9998031,0.00002066656,0.00001514047,0.00004468957,0.00009341674,0.00002293353],"domain_scores_gemma":[0.9997818,0.00005315991,0.00005457441,0.00004691552,0.0000382795,0.00002525805],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008527287,0.00000489943,0.00005261439,0.00001581314,0.000001421704,0.00003689552,0.00001186405,0.00006487066,0.9989659,0.00006585228,0.00001873882,0.0007526102],"study_design_scores_gemma":[0.000004120924,0.0000507998,0.0006002446,0.000002739008,0.000003038266,0.0000686824,0.000009029452,0.000686878,0.9977976,0.00002220018,0.0007508018,0.000003846571],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9562673,0.000600912,0.03977988,0.0001439357,0.00007157719,0.0001397987,0.0003702193,0.0004132983,0.002213112],"genre_scores_gemma":[0.9114515,0.0009084743,0.08357226,0.0001068831,0.00002372648,0.0002038201,0.0003295366,0.00007015705,0.003333695],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005103846,"threshold_uncertainty_score":0.002256274,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02246229387107307,"score_gpt":0.2409195320262593,"score_spread":0.2184572381551862,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}