{"id":"W2058027300","doi":"10.1149/1.3501035","title":"3D Hybrid Integration Technology for Opto-Electronic Hetero-Integrated Systems","year":2010,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Semiconductor Lasers and Optical Devices","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Photonics; Materials science; Interposer; Optoelectronics; Photodiode; CMOS; Microelectromechanical systems; Photonic integrated circuit; Silicon photonics; Waveguide; Chip; Integrated circuit; Electronics; Electrical engineering; Etching (microfabrication); Nanotechnology; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005673168,0.0001352457,0.0001453549,0.0001467258,0.00009129511,0.00004971001,0.0001138615,0.0001363912,0.0001032235],"category_scores_gemma":[0.00001076063,0.0001230156,0.00006740553,0.0001982875,0.00003890856,0.000141707,9.516685e-7,0.0004477981,0.00003081662],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005150595,"about_ca_system_score_gemma":0.00002238429,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002434604,"about_ca_topic_score_gemma":0.0002076452,"domain_scores_codex":[0.999329,0.000005131748,0.0001759779,0.0001513034,0.00005621865,0.0002824223],"domain_scores_gemma":[0.999648,0.00004456285,0.00001489014,0.0001759545,0.00006402271,0.00005260893],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00001698154,0.00007508478,0.00001805206,0.00008971798,0.000169752,0.000002094777,0.000080153,0.01520248,0.9261739,0.006532093,0.0005302582,0.05110938],"study_design_scores_gemma":[0.000464352,0.0001101311,0.0000133097,0.00003180181,0.00008090019,0.00005121866,0.0002289211,0.4947286,0.2855347,0.0005027551,0.2179376,0.0003156453],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3722029,0.0002452774,0.6239861,0.0001188037,0.001803146,0.0003180651,0.00006759483,0.0006769378,0.0005811066],"genre_scores_gemma":[0.9974827,0.00004363501,0.001934743,0.00001043036,0.00007302204,0.0001841993,0.00003131293,0.00003330627,0.0002066899],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.6406392,"threshold_uncertainty_score":0.5016431,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005592629346331886,"score_gpt":0.2077998046387461,"score_spread":0.2022071752924142,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}