{"id":"W2058181022","doi":"10.1557/proc-1073-h01-07","title":"Work Function Tuning of Mo<sub>x</sub>Si<sub>y</sub>N<sub>z</sub>metal gate electrode for Advanced CMOS Technology","year":2008,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Manitoba","funders":"","keywords":"Work function; Metal gate; Silicide; Nitrogen; Analytical Chemistry (journal); X-ray photoelectron spectroscopy; Materials science; Electrode; Argon; Sputtering; CMOS; Molybdenum; Metal; Transistor; Nanotechnology; Chemistry; Optoelectronics; Thin film; Atomic physics; Silicon; Voltage; Gate oxide; Electrical engineering; Metallurgy; Physics; Nuclear magnetic resonance; Physical chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002874971,0.0005935386,0.0007916015,0.0005336847,0.0002533141,0.00007283798,0.0003547725,0.0004957971,0.000006738984],"category_scores_gemma":[0.0001632645,0.0006320809,0.000206133,0.001097192,0.000157163,0.0007031733,0.00009856976,0.0004264023,0.00005168786],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001715726,"about_ca_system_score_gemma":0.00004502033,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003065756,"about_ca_topic_score_gemma":0.000003642849,"domain_scores_codex":[0.9971503,0.000009199403,0.0007824328,0.0007016005,0.0003513995,0.001005042],"domain_scores_gemma":[0.998868,0.00005874219,0.0003275666,0.0002340307,0.0003571626,0.0001544312],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002199748,0.00004588518,0.0005223328,0.0004248176,0.0001345703,0.00000370153,0.0003432388,0.0003975036,0.9904272,0.0002272054,0.0009208829,0.006332677],"study_design_scores_gemma":[0.001028362,0.0003210347,0.0007083002,0.0002272146,0.0001183959,0.00006809097,0.000257168,0.00117351,0.9935132,0.001047819,0.0008867185,0.0006502077],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9949375,0.001118873,0.0007089588,0.00006517319,0.0009932262,0.0007444215,0.00001930412,0.001196884,0.000215668],"genre_scores_gemma":[0.9975272,0.00067381,0.0007150418,0.00008356516,0.0004152496,0.0003441821,0.00003299041,0.0001988149,0.000009176535],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00568247,"threshold_uncertainty_score":0.999613,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00944880151931876,"score_gpt":0.1913358617396546,"score_spread":0.1818870602203359,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}