{"id":"W2058202052","doi":"10.1109/iedm.2008.4796706","title":"Fluorinated HfO<inf>2</inf> gate dielectrics engineering for CMOS by pre- and post-CF<inf>4</inf> plasma passivation","year":2008,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Research Council Canada; Institute for Microstructural Sciences","funders":"","keywords":"Passivation; CMOS; Dielectric; Electrical engineering; Materials science; Optoelectronics; Reliability (semiconductor); MOSFET; Fluorine; Permittivity; Electron mobility; Electric field; Physics; Nanotechnology; Engineering; Transistor; Voltage; Quantum mechanics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005010868,0.00126221,0.001225114,0.0005879181,0.0004233342,0.0004464921,0.0006186769,0.0007824083,0.000381024],"category_scores_gemma":[0.0004636295,0.001253202,0.0002789235,0.0009198979,0.0001039756,0.001275438,0.000189403,0.0004507772,0.0001058766],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003415165,"about_ca_system_score_gemma":0.000118075,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001009839,"about_ca_topic_score_gemma":0.0000816414,"domain_scores_codex":[0.9948506,0.00006717227,0.001516891,0.001115832,0.0007602682,0.001689285],"domain_scores_gemma":[0.9972152,0.0005597603,0.0003317847,0.0008519352,0.0004872888,0.0005540589],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001573744,0.0001036928,0.00033096,0.0007099761,0.0003110028,0.00003014219,0.0006197271,0.007954449,0.9739841,0.001260996,0.01272201,0.001815527],"study_design_scores_gemma":[0.004221788,0.000776627,0.006886939,0.0002817002,0.000263844,0.0002261581,0.00005947416,0.2258648,0.5969381,0.0001251533,0.1615087,0.002846728],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9860024,0.00251932,0.003339028,0.0001778624,0.001978958,0.001612212,0.0003503192,0.001972606,0.002047241],"genre_scores_gemma":[0.9907587,0.001448521,0.003352177,0.0002246301,0.0007210492,0.0003947885,0.0006282582,0.0003799446,0.002091978],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.377046,"threshold_uncertainty_score":0.9989918,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008163865029530128,"score_gpt":0.1927833804889933,"score_spread":0.1846195154594632,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}