{"id":"W2059027568","doi":"10.1116/1.2890688","title":"Deep-UV exposure of poly(methyl methacrylate) at 254 nm using low-pressure mercury vapor lamps","year":2008,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":32,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Methyl methacrylate; Mercury (programming language); Photoresist; Poly(methyl methacrylate); Mercury-vapor lamp; Dissolution; Wavelength; Polymer; Optoelectronics; Composite material; Chemistry; Polymerization; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0009074429,0.0003219482,0.0006179276,0.001003608,0.0004198438,0.00008711141,0.0004908743,0.0001918684,0.00001580137],"category_scores_gemma":[0.00004116792,0.0002515795,0.00007092061,0.0009306732,0.0006838578,0.0004861638,0.0001422607,0.0003505188,1.433622e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001700407,"about_ca_system_score_gemma":0.0002576582,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004433079,"about_ca_topic_score_gemma":0.000004062028,"domain_scores_codex":[0.9978186,0.0000295912,0.0006874811,0.000333185,0.0005502801,0.0005808834],"domain_scores_gemma":[0.9987074,0.00001652558,0.0004917977,0.0002182749,0.0004347523,0.0001312117],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004510321,0.00001865625,0.002024619,0.0002063888,0.0001032901,0.000005054201,0.0006617368,0.0001280053,0.9891629,0.00008258494,0.000004920376,0.007556695],"study_design_scores_gemma":[0.001002515,0.0004415548,0.002575482,0.0001843527,0.0002192196,0.0009680623,0.000289747,0.001427695,0.9887383,0.003073546,0.0006121258,0.0004674266],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8448841,0.1541328,0.0005233386,0.00004348472,0.000254778,0.00009763562,0.000003728148,0.00003680728,0.00002329643],"genre_scores_gemma":[0.9939375,0.002025292,0.003900597,0.00002353659,0.00007742026,0.000001906405,4.394845e-7,0.00002839338,0.000004915792],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1521075,"threshold_uncertainty_score":0.9999936,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01703517458885275,"score_gpt":0.2208986170013156,"score_spread":0.2038634424124628,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}