{"id":"W2059294855","doi":"10.1063/1.2759196","title":"Substrate biasing effect on the electrical properties of magnetron-sputtered high-k titanium silicate thin films","year":2007,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Institut National de la Recherche Scientifique","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Biasing; Materials science; Sputter deposition; Titanium; X-ray photoelectron spectroscopy; Substrate (aquarium); Analytical Chemistry (journal); Thin film; Sputtering; Rutherford backscattering spectrometry; Dielectric; Dissipation factor; Microstructure; Optoelectronics; Composite material; Voltage; Nuclear magnetic resonance; Nanotechnology; Chemistry; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004482281,0.0001494371,0.0002941364,0.00004331465,0.00003419944,0.00004176095,0.0001859316,0.0000561849,0.00001654056],"category_scores_gemma":[0.000008198311,0.00008759875,0.00008127724,0.0001532386,0.00003502315,0.00007213025,0.0000118127,0.0002434148,0.00001104388],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003081756,"about_ca_system_score_gemma":0.00001336462,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000005605252,"about_ca_topic_score_gemma":5.739532e-7,"domain_scores_codex":[0.9990833,0.00001903551,0.000384109,0.00007336278,0.0002398977,0.0002002299],"domain_scores_gemma":[0.9994369,0.00013955,0.0001915767,0.0001433082,0.00004553517,0.00004318244],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001841886,0.00002714948,0.00002537498,0.00006281483,0.00005406817,0.000002426098,0.0001448352,0.006950784,0.9904557,0.001160198,0.0002392474,0.0006932556],"study_design_scores_gemma":[0.0002725334,0.000199071,0.0009394577,0.00005490667,0.0000327562,0.000004724153,0.00003929363,0.001073043,0.9967321,0.0004922785,0.00006215951,0.00009773731],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981118,0.0001654692,0.0001192564,0.00001147026,0.0002857432,0.0001166605,0.000002022326,0.00002682052,0.001160698],"genre_scores_gemma":[0.9993276,0.00001550224,0.0001920596,0.00005092752,0.0003810621,0.000001702324,7.221624e-7,0.00002704933,0.000003402003],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006276381,"threshold_uncertainty_score":0.3572174,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01629221127479431,"score_gpt":0.2028179041224513,"score_spread":0.186525692847657,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}