{"id":"W2059294855","doi":"10.1063/1.2759196","title":"Substrate biasing effect on the electrical properties of magnetron-sputtered high-k titanium silicate thin films","year":2007,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalsa Corporation; Institut National de la Recherche Scientifique","funders":"Natural Sciences and Engineering Research Council of Canada; Fonds Québécois de la Recherche sur la Nature et les Technologies","keywords":"Biasing; Materials science; Sputter deposition; Titanium; X-ray photoelectron spectroscopy; Substrate (aquarium); Analytical Chemistry (journal); Thin film; Sputtering; Rutherford backscattering spectrometry; Dielectric; Dissipation factor; Microstructure; Optoelectronics; Composite material; Voltage; Nuclear magnetic resonance; Nanotechnology; Chemistry; Metallurgy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001256351,0.0002669262,0.0002146295,0.000132107,0.000141727,0.0002943139,0.0001597403,0.0002009781,0.0008788217],"category_scores_gemma":[0.0003244096,0.0001586182,0.0001305952,0.0001568196,0.0001921504,0.0001876201,0.0001294248,0.0001934082,0.0001762132],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001401178,"about_ca_system_score_gemma":0.00008319037,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003740163,"about_ca_topic_score_gemma":0.0005711279,"domain_scores_codex":[0.9999086,0.00001106357,0.000009075709,0.00001968711,0.00003115757,0.00002052903],"domain_scores_gemma":[0.9997918,0.0000880588,0.00004306723,0.00001778877,0.00004537516,0.00001398652],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006822315,0.000004322033,0.0005812702,0.0000421687,0.000009666278,0.0000806722,0.00003033311,0.0001060575,0.9981908,0.00001275512,0.00001176284,0.0008620308],"study_design_scores_gemma":[0.000007449855,0.0001231276,0.005936176,0.000003667491,0.00001499235,0.00008567861,0.00004311902,0.0005418198,0.9929714,0.000007834486,0.0002617443,0.000003000275],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9988592,0.000427078,0.0003091921,0.00001970841,0.000008818367,0.000002546189,0.00004573537,0.00001704338,0.0003106045],"genre_scores_gemma":[0.9990133,0.0002789772,0.0003500092,0.00001155283,0.000004129519,0.000003193206,0.00005878431,0.0000110037,0.0002688793],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008788217,"threshold_uncertainty_score":0.002939939,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01629221127479431,"score_gpt":0.2028179041224513,"score_spread":0.186525692847657,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}