{"id":"W2059594213","doi":"10.1116/1.2731330","title":"Nanoscale resist morphologies of dense gratings using electron-beam lithography","year":2007,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; Applied Nanotools (Canada); University of Alberta","funders":"","keywords":"Resist; Electron-beam lithography; Materials science; Lithography; Nanoscopic scale; Cathode ray; Nanolithography; Nanotechnology; Nanostructure; Optics; Resolution (logic); Optoelectronics; Electron; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000207962,0.0001884581,0.0001891699,0.00018716,0.0001247191,0.0002682114,0.0002096723,0.0002073583,0.0003669179],"category_scores_gemma":[0.0006044199,0.0002780031,0.0001294928,0.0001223377,0.0002662173,0.0003027869,0.0001994309,0.0001999978,0.00006768991],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002393799,"about_ca_system_score_gemma":0.000098807,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005075188,"about_ca_topic_score_gemma":0.001033883,"domain_scores_codex":[0.9998813,0.000009627805,0.000009931047,0.00002870193,0.00005472337,0.00001578741],"domain_scores_gemma":[0.9994753,0.000240466,0.0001271257,0.0000929822,0.00004599929,0.00001810823],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003558222,0.00001869067,0.001558189,0.00006789513,0.000007571384,0.0001023987,0.00006118658,0.002968531,0.9900867,0.0002895589,0.00002463663,0.00477911],"study_design_scores_gemma":[0.00001996502,0.000177473,0.01760534,0.00001388642,0.0000164001,0.0004740391,0.00004507309,0.02793928,0.9520641,0.0003031415,0.001322448,0.00001889625],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9726762,0.0003733092,0.02567361,0.00002504164,0.000007058032,0.00002610791,0.00009672138,0.0001529572,0.0009689947],"genre_scores_gemma":[0.9745566,0.0001780158,0.02475135,0.0000111606,0.000002614595,0.00001040812,0.00008587497,0.00002018204,0.0003837398],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005075188,"threshold_uncertainty_score":0.001736879,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01183601016507548,"score_gpt":0.2479941810426743,"score_spread":0.2361581708775988,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}