{"id":"W2059594213","doi":"10.1116/1.2731330","title":"Nanoscale resist morphologies of dense gratings using electron-beam lithography","year":2007,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; Applied Nanotools (Canada); University of Alberta","funders":"","keywords":"Resist; Electron-beam lithography; Materials science; Lithography; Nanoscopic scale; Cathode ray; Nanolithography; Nanotechnology; Nanostructure; Optics; Resolution (logic); Optoelectronics; Electron; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001809386,0.0002931651,0.0004657809,0.002353664,0.0003308627,0.00008728918,0.0004889073,0.000145508,0.000001301643],"category_scores_gemma":[0.00005218826,0.0002433326,0.00007711924,0.002133153,0.001133343,0.0004045726,0.0000947161,0.0004681212,1.494982e-8],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001944421,"about_ca_system_score_gemma":0.0001655426,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002166743,"about_ca_topic_score_gemma":0.00000310014,"domain_scores_codex":[0.9977031,0.00001417657,0.0007438427,0.0003027979,0.0005260706,0.0007100282],"domain_scores_gemma":[0.9986491,0.0000203943,0.0005125917,0.000203413,0.0005133202,0.0001011916],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004292605,0.00002574695,0.003869537,0.0001013355,0.00005490946,0.000003534131,0.0001768588,0.00001667399,0.964591,0.0003713293,0.000004065059,0.0307421],"study_design_scores_gemma":[0.0004228844,0.0006709915,0.001920533,0.0001709508,0.00008593911,0.0002728632,0.0002536529,0.0001290599,0.9766623,0.01883164,0.0002850575,0.0002941129],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9271179,0.04778182,0.02468971,0.00002650714,0.000104368,0.0001506193,0.000002199501,0.00008164808,0.00004526888],"genre_scores_gemma":[0.9640983,0.001551714,0.03427592,0.00001859763,0.0000282306,0.000002462247,2.077096e-7,0.0000234448,0.00000114582],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04623011,"threshold_uncertainty_score":0.9922813,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01183601016507548,"score_gpt":0.2479941810426743,"score_spread":0.2361581708775988,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}