{"id":"W2059705743","doi":"10.1016/j.ccr.2013.07.010","title":"Metal ALD and pulsed CVD: Fundamental reactions and links with solution chemistry","year":2013,"lang":"en","type":"article","venue":"Coordination Chemistry Reviews","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":83,"is_retracted":false,"has_abstract":false,"ca_institutions":"McMaster University","funders":"Intel Corporation; Semiconductor Research Corporation","keywords":"Atomic layer deposition; Chemistry; Reactivity (psychology); Deposition (geology); Chemical vapor deposition; Metal; Nanotechnology; Thermal decomposition; Surface modification; Thin film; Chemical engineering; Layer (electronics); Organic chemistry; Materials science; Physical chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005235129,0.0005828342,0.0006732852,0.0006094318,0.0004066031,0.001730528,0.001043349,0.00108908,0.003592416],"category_scores_gemma":[0.0005539369,0.0004909261,0.0002390592,0.0007971844,0.002110233,0.002570034,0.001226016,0.002535322,0.000748623],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009723803,"about_ca_system_score_gemma":0.0004615003,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005032303,"about_ca_topic_score_gemma":0.0005858361,"domain_scores_codex":[0.999679,0.00004958075,0.00001277014,0.00007978956,0.0001266554,0.00005223802],"domain_scores_gemma":[0.9997106,0.0002021216,0.00002088787,0.00002525158,0.00002363574,0.00001750865],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001885783,0.0002923826,0.0003247271,0.004722226,0.00005100287,0.0003067406,0.0008092236,0.001948419,0.1695,0.3749642,0.01304117,0.4338514],"study_design_scores_gemma":[0.00003539316,0.0002545934,0.0008543856,0.0004157453,0.0000282206,0.000780889,0.0003709799,0.003262249,0.2709812,0.1284616,0.594488,0.00006681649],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"review","genre_gemma":"review","genre_scores_codex":[0.02248803,0.8878484,0.04156641,0.004430706,0.001532057,0.00005059376,0.0001036761,0.0001700529,0.04181016],"genre_scores_gemma":[0.2481746,0.6999046,0.0181673,0.001815444,0.002052322,0.0001073464,0.0001564525,0.0001247086,0.02949734],"genre_candidate":"review","genre_consensus":"review","teacher_disagreement_score":0.003592416,"threshold_uncertainty_score":0.01201779,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01584407562861189,"score_gpt":0.220058878340382,"score_spread":0.2042148027117701,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}