{"id":"W2059711083","doi":"10.1016/j.tsf.2012.07.039","title":"The effect of nickel on the strain evolution in chemical copper films","year":2012,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":17,"is_retracted":false,"has_abstract":false,"ca_institutions":"Mount Allison University","funders":"","keywords":"Nickel; Copper; Strain (injury); Metallurgy; Materials science; Chemistry; Biology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00014677,0.0001714749,0.0001697973,0.0001499882,0.0004137979,0.0005190104,0.0003038513,0.0002331501,0.001728846],"category_scores_gemma":[0.000725297,0.0001902226,0.00008051054,0.0002136279,0.0004376768,0.0003602528,0.0001535904,0.0003470415,0.0001877822],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004650273,"about_ca_system_score_gemma":0.0001796078,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002855702,"about_ca_topic_score_gemma":0.003945664,"domain_scores_codex":[0.9998775,0.00001746682,0.000007015301,0.00002113125,0.00004620844,0.00003070192],"domain_scores_gemma":[0.9997314,0.0001090579,0.00004366399,0.00003557288,0.00005802356,0.00002234321],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0008266561,0.00005382417,0.001139985,0.0001307126,0.00001542483,0.000243514,0.0003223284,0.0005778273,0.9891685,0.0005939509,0.0002622122,0.006665],"study_design_scores_gemma":[0.00001008888,0.0001354917,0.00308982,0.00000462883,0.000008108433,0.00004969092,0.0000782534,0.001296929,0.9940883,0.00003257679,0.001199391,0.0000067798],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9952284,0.0006943186,0.0002138559,0.00006988736,0.00002313563,0.000006368722,0.00005207444,0.00002497282,0.003687031],"genre_scores_gemma":[0.997922,0.0002729105,0.0001593021,0.00001524021,0.000008190143,0.000003643655,0.0000483152,0.00002081037,0.001549631],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002855702,"threshold_uncertainty_score":0.005783498,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01187688864491882,"score_gpt":0.2688202848324743,"score_spread":0.2569433961875555,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}