{"id":"W2060072331","doi":"10.1109/tie.2011.2178210","title":"Development of a Vector Display System Based on a Surface-Micromachined Micromirror","year":2011,"lang":"en","type":"article","venue":"IEEE Transactions on Industrial Electronics","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":46,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University; University of Toronto","funders":"","keywords":"Surface micromachining; Microelectromechanical systems; Settling time; Actuator; Digital micromirror device; Voltage; Optics; Materials science; Engineering; Optoelectronics; Electrical engineering; Physics; Fabrication; Step response","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000397736,0.0005288896,0.0004825148,0.0003376691,0.000221905,0.0003958113,0.001323643,0.0003857384,0.003574359],"category_scores_gemma":[0.0005109013,0.0003716596,0.0002721824,0.0002700661,0.0001655793,0.0007657643,0.0003958055,0.0005786606,0.001140824],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002221182,"about_ca_system_score_gemma":0.0004157071,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007051394,"about_ca_topic_score_gemma":0.0006624704,"domain_scores_codex":[0.9996239,0.00002839732,0.0000273149,0.00009401151,0.0001976384,0.00002866596],"domain_scores_gemma":[0.9997186,0.0000592034,0.00002750107,0.00004403985,0.0001140131,0.00003655185],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001360302,0.00005623376,0.0005661147,0.000162647,0.00001952722,0.0002533621,0.00007236978,0.0008326042,0.9084014,0.001100185,0.001893098,0.08650644],"study_design_scores_gemma":[0.0001546986,0.001728988,0.005744789,0.00003336926,0.00008943422,0.003241219,0.00006059969,0.04597823,0.8943083,0.0004040159,0.04813349,0.0001229117],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1609414,0.001273201,0.8130299,0.0002730386,0.0005261877,0.0005509314,0.0005122115,0.01230992,0.0105832],"genre_scores_gemma":[0.3380958,0.000699719,0.646998,0.0001477289,0.0001421863,0.0002348082,0.0006468319,0.0004951462,0.01253975],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003574359,"threshold_uncertainty_score":0.01195747,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03290023697397091,"score_gpt":0.2199381076822511,"score_spread":0.1870378707082802,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}