{"id":"W2060296114","doi":"10.1109/iedm.2008.4796774","title":"Gate length scaling and high drive currents enabled for high performance SOI technology using high-κ/metal gate","year":2008,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Metal gate; Materials science; CMOS; Silicon on insulator; Optoelectronics; Scaling; High-κ dielectric; Scalability; Electrical engineering; Logic gate; Transistor; MOSFET; Gate oxide; Electronic engineering; Voltage; Engineering; Computer science; Silicon; Dielectric","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009257964,0.0002207783,0.0001241187,0.0001122545,0.00017566,0.0003681711,0.0002672386,0.0001456113,0.0008513725],"category_scores_gemma":[0.0001984552,0.00009616411,0.0001127086,0.0001424598,0.0002871983,0.0003131155,0.0002882734,0.0002036977,0.0002067729],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002530333,"about_ca_system_score_gemma":0.0002047446,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006114767,"about_ca_topic_score_gemma":0.002240987,"domain_scores_codex":[0.9999379,0.000003978515,0.000003361209,0.00001127112,0.00002854509,0.000015002],"domain_scores_gemma":[0.9998591,0.00002568276,0.00004280009,0.00002207932,0.00003259063,0.0000177975],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002259176,0.00001088419,0.0005443284,0.00003229625,0.000004557718,0.0000955553,0.00007303082,0.0003388915,0.9947672,0.001214419,0.0001378256,0.002758459],"study_design_scores_gemma":[0.00002412173,0.0003735207,0.005550739,0.00001137115,0.0000194731,0.0005047767,0.0001059644,0.004078179,0.9800553,0.001034865,0.00822809,0.00001363955],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.9834309,0.0004878053,0.006906124,0.0001573422,0.00004037951,0.00002532798,0.0001287075,0.0002129774,0.008610476],"genre_scores_gemma":[0.9924995,0.0002081087,0.005904229,0.00001944158,0.00001454124,0.0000117141,0.00006959888,0.00001675584,0.00125601],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.0008513725,"threshold_uncertainty_score":0.002848089,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0187655555008628,"score_gpt":0.2180229137273224,"score_spread":0.1992573582264596,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}