{"id":"W2060630166","doi":"10.1016/j.nimb.2005.08.079","title":"Solid phase epitaxial regrowth of amorphous layers in silicon created by low energy phosphorus implantation: A medium energy ion scattering study","year":2005,"lang":"en","type":"article","venue":"Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Western University","funders":"","keywords":"Epitaxy; Materials science; Silicon; Scattering; Amorphous solid; Low energy; Ion implantation; Ion; Phosphorus; Phase (matter); Optoelectronics; Atomic physics; Optics; Nanotechnology; Crystallography; Chemistry; Metallurgy; Layer (electronics); Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005036754,0.0002093196,0.0003816352,0.0004142309,0.0001714384,0.0001637883,0.00008864499,0.00007510164,0.0001176768],"category_scores_gemma":[0.00001547522,0.0001905157,0.00003283671,0.0005427401,0.00009866153,0.0005688668,0.00006249258,0.0002677878,0.000001334627],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001752154,"about_ca_system_score_gemma":0.00001912721,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003802219,"about_ca_topic_score_gemma":0.0003436394,"domain_scores_codex":[0.9983286,0.0002931974,0.0004987284,0.0003271296,0.0002425915,0.000309754],"domain_scores_gemma":[0.9994261,0.0001051594,0.0001057873,0.000167972,0.0001050439,0.00008996075],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004075263,0.0007380439,0.0004688607,0.00004933942,0.0001567195,0.000005209991,0.0009810184,0.001427065,0.9086657,0.00007636436,0.0001016141,0.08692258],"study_design_scores_gemma":[0.00284964,0.0006529975,0.001253918,0.0003002703,0.00004020409,0.00004160179,0.004067594,0.02253257,0.9638985,0.0001181089,0.003897995,0.0003465894],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9978637,0.00003377875,0.00126562,0.00004086092,0.0003576733,0.0001694207,0.00004153037,0.00004226198,0.0001851174],"genre_scores_gemma":[0.9977179,0.0007528324,0.001153552,0.00001460789,0.0001648004,0.00007161728,0.00002740741,0.00004361976,0.00005362797],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08657599,"threshold_uncertainty_score":0.7769006,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01966538328796836,"score_gpt":0.3802535996892109,"score_spread":0.3605882164012425,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}