{"id":"W2060630166","doi":"10.1016/j.nimb.2005.08.079","title":"Solid phase epitaxial regrowth of amorphous layers in silicon created by low energy phosphorus implantation: A medium energy ion scattering study","year":2005,"lang":"en","type":"article","venue":"Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms","topic":"Ion-surface interactions and analysis","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Western University","funders":"","keywords":"Epitaxy; Materials science; Silicon; Scattering; Amorphous solid; Low energy; Ion implantation; Ion; Phosphorus; Phase (matter); Optoelectronics; Atomic physics; Optics; Nanotechnology; Crystallography; Chemistry; Metallurgy; Layer (electronics); Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008091562,0.0001673592,0.0001700129,0.0001470166,0.0001584178,0.0002530089,0.0002146252,0.0002300998,0.0009426537],"category_scores_gemma":[0.0001440434,0.0001444928,0.0001551426,0.0001722093,0.0002839053,0.0001960331,0.0001476355,0.0001657005,0.0001407452],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001696013,"about_ca_system_score_gemma":0.0001931782,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00160693,"about_ca_topic_score_gemma":0.001721837,"domain_scores_codex":[0.9999472,0.000004964906,0.000002876884,0.00001012127,0.000020443,0.0000144268],"domain_scores_gemma":[0.9998984,0.0000260013,0.00003473808,0.00001093733,0.00001571069,0.00001415628],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001422601,0.00001614821,0.0004796879,0.00002092152,0.000006184975,0.0001083063,0.00004442883,0.0002072108,0.9984693,0.0001147459,0.00001728773,0.0003734848],"study_design_scores_gemma":[0.00004000608,0.0004820179,0.01394679,0.000004179916,0.00002536862,0.000301378,0.0001854206,0.003605749,0.9805668,0.00006735024,0.0007682362,0.000006770053],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9994073,0.0001071758,0.0001464871,0.000005033879,0.000001596854,0.000002799303,0.00003467542,0.000004632847,0.0002903946],"genre_scores_gemma":[0.9989303,0.00009971254,0.0002493978,0.000004078727,0.000001586289,0.000003107344,0.0000666503,0.000004588216,0.0006406372],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00160693,"threshold_uncertainty_score":0.003195167,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01966538328796836,"score_gpt":0.3802535996892109,"score_spread":0.3605882164012425,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}