{"id":"W2061268494","doi":"10.1117/12.810028","title":"Hybrid wafer-level vacuum hermetic micropackaging technology for MOEMS-MEMS","year":2009,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National d'Optique","funders":"","keywords":"Microelectromechanical systems; Wafer; Materials science; Torr; Optoelectronics; Microfabrication; Wafer-level packaging; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001323184,0.0003545131,0.0003043312,0.0002429362,0.0002245703,0.0004242087,0.0005547273,0.0003952448,0.001598937],"category_scores_gemma":[0.0001946785,0.0002483984,0.0002943851,0.0002107391,0.0001616715,0.0003995508,0.0003825642,0.0004931255,0.0009444463],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003077043,"about_ca_system_score_gemma":0.0001236165,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003854561,"about_ca_topic_score_gemma":0.000551722,"domain_scores_codex":[0.9997899,0.00001191171,0.00001005321,0.00005025993,0.0001084088,0.0000295076],"domain_scores_gemma":[0.9998977,0.00001791583,0.00003889283,0.00001724906,0.00002140402,0.000006777459],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001848306,0.00001086922,0.0001673355,0.00009914544,0.000009363393,0.00006031981,0.00003855872,0.0001567437,0.9910614,0.0006774376,0.0003027148,0.007397805],"study_design_scores_gemma":[0.000003913877,0.0002003951,0.002248308,0.000008829803,0.00002061726,0.0003675003,0.00002208541,0.001764148,0.9805638,0.0000755358,0.0147068,0.00001812743],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7959639,0.01440558,0.167137,0.0003180335,0.0007183856,0.0002800956,0.0007511656,0.002731656,0.0176941],"genre_scores_gemma":[0.9072569,0.002224019,0.07970881,0.0001127199,0.00009320654,0.0002270521,0.0005167436,0.0001576874,0.00970287],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001598937,"threshold_uncertainty_score":0.005348921,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01200176585438198,"score_gpt":0.2197114554198213,"score_spread":0.2077096895654393,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}