{"id":"W2061324843","doi":"10.1117/12.721502","title":"Complex MEMS device: microshutter array system for space applications","year":2007,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Spacecraft Design and Technology","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Canadian Space Agency; Office of Naval Research; Goddard Space Flight Center; European Space Agency; National Aeronautics and Space Administration","keywords":"James Webb Space Telescope; Microelectromechanical systems; Shutter; Optics; Surface micromachining; Materials science; Optical path; Optoelectronics; Telescope; Physics; Fabrication","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004265525,0.0005579476,0.0006696146,0.0005278363,0.0005158377,0.000525795,0.0009602143,0.0005784495,0.02401135],"category_scores_gemma":[0.000363199,0.0002608996,0.0002468803,0.0003976806,0.0002133905,0.000593233,0.0006047987,0.0005258765,0.005526728],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005919577,"about_ca_system_score_gemma":0.0005970325,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007107418,"about_ca_topic_score_gemma":0.001595118,"domain_scores_codex":[0.9995546,0.00002888027,0.00001969351,0.0001071639,0.0002450173,0.00004468668],"domain_scores_gemma":[0.999751,0.00002951827,0.00004181376,0.00005116337,0.00008031745,0.00004608413],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004425025,0.0001478891,0.001764913,0.0003466691,0.00006172636,0.0002139002,0.00013109,0.0008428713,0.7994623,0.005717963,0.05462554,0.1362425],"study_design_scores_gemma":[0.0002655054,0.001876386,0.01421097,0.00003665287,0.00008961267,0.002123056,0.00006395856,0.03586493,0.5807433,0.0007351073,0.3638372,0.0001532885],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3207006,0.005477399,0.5059466,0.001901566,0.002025957,0.002701989,0.008983135,0.05938444,0.09287824],"genre_scores_gemma":[0.5680097,0.001324206,0.3079034,0.001215954,0.0007853066,0.001827214,0.005016589,0.000810619,0.1131071],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.02401135,"threshold_uncertainty_score":0.08032596,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01355363993072049,"score_gpt":0.2345981088971713,"score_spread":0.2210444689664508,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}