{"id":"W2062384100","doi":"10.1063/1.2748868","title":"H + ion-implantation energy dependence of electronic transport properties in the MeV range in n-type silicon wafers using frequency-domain photocarrier radiometry","year":2007,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada; Suzhou University; Government of Jiangsu Province; Alexander von Humboldt-Stiftung","keywords":"Overlayer; Ion implantation; Materials science; Wafer; Ion; Silicon; Analytical Chemistry (journal); Diffusion; Molecular physics; Optoelectronics; Chemistry; Physical chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002358926,0.0002375093,0.0001720645,0.00022923,0.0001127952,0.000215632,0.0002362263,0.0001969631,0.0007839947],"category_scores_gemma":[0.0004947989,0.0001595152,0.0001347451,0.0002742117,0.0001916949,0.0003303555,0.0001218326,0.0001850288,0.0001394556],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002968043,"about_ca_system_score_gemma":0.0001155559,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001113113,"about_ca_topic_score_gemma":0.001320834,"domain_scores_codex":[0.9998798,0.00001570888,0.000008765142,0.0000362992,0.00003749463,0.0000218245],"domain_scores_gemma":[0.9996685,0.0001669504,0.00006252759,0.00003809672,0.00005377317,0.00001017892],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001550073,0.00001847859,0.001068648,0.00002936028,0.000006549295,0.00004011612,0.0000499077,0.0007281948,0.9963278,0.0000596977,0.00001706389,0.001499269],"study_design_scores_gemma":[0.000005655237,0.0001883447,0.007019389,0.000002861074,0.000007376348,0.00005814094,0.00003390057,0.003364715,0.9891071,0.00002669024,0.0001804008,0.000005403907],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9979499,0.0001584329,0.001340058,0.0000120894,0.000002221851,0.000007908866,0.0001435272,0.00003699227,0.0003488077],"genre_scores_gemma":[0.9979421,0.0001484535,0.001220708,0.000007523115,0.000001666333,0.000009413746,0.0001456171,0.00001294779,0.0005115667],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001113113,"threshold_uncertainty_score":0.002622664,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01555593624042644,"score_gpt":0.2202936191247416,"score_spread":0.2047376828843151,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}