{"id":"W2062795510","doi":"10.1007/s11664-005-0157-7","title":"Effect of film thickness on the evolution of annealing texture in sputtered copper films","year":2005,"lang":"en","type":"article","venue":"Journal of Electronic Materials","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":36,"is_retracted":false,"has_abstract":false,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"Advanced Micro Devices","keywords":"Annealing (glass); Grain boundary; Electron backscatter diffraction; Materials science; Crystal twinning; Condensed matter physics; Copper; Sputtering; Diffraction; Texture (cosmology); Grain size; Electron diffraction; Microstructure; Thin film; Crystallography; Composite material; Optics; Metallurgy; Chemistry; Nanotechnology; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001518437,0.0001830837,0.0002601483,0.0001446919,0.000240151,0.0004984073,0.0002221913,0.0002601998,0.001828728],"category_scores_gemma":[0.0007978156,0.0003640571,0.0001281186,0.000241305,0.0002513665,0.0002897956,0.0001232834,0.0004010541,0.0001561648],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003305688,"about_ca_system_score_gemma":0.0001690098,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001980929,"about_ca_topic_score_gemma":0.002588906,"domain_scores_codex":[0.9998938,0.00001158672,0.000009200402,0.00002454391,0.0000272543,0.00003356181],"domain_scores_gemma":[0.9995375,0.0002044703,0.00009709954,0.00004100739,0.00008040773,0.00003954602],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000699107,0.00002060476,0.0009446739,0.00005784961,0.00001587144,0.0001368143,0.00008375071,0.000278928,0.9958895,0.00003665241,0.00008342817,0.001752831],"study_design_scores_gemma":[0.00003671515,0.0003586152,0.01002058,0.000007427102,0.00003384407,0.00008650988,0.00006497328,0.001403822,0.9874371,0.00001749464,0.0005240581,0.000008806714],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981698,0.0005713774,0.0003288861,0.00004178483,0.00002115003,0.000007451881,0.0001026202,0.00002613564,0.000730822],"genre_scores_gemma":[0.9987743,0.0002461495,0.000312293,0.00002039359,0.00001101656,0.000005444135,0.0000760078,0.00002729601,0.0005270199],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001980929,"threshold_uncertainty_score":0.006117702,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005607338767230088,"score_gpt":0.2520540564402431,"score_spread":0.2464467176730131,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}