{"id":"W2062891188","doi":"10.1557/proc-1222-dd01-06","title":"Effect of Thin Aluminum Coatings on Structural Damping of Silicon Microresonators","year":2009,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":2,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Sherbrooke; McGill University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Thermoelastic damping; Silicon; Resonator; Cantilever; Substrate (aquarium); Aluminium; Dissipation; Thin film; Composite material; Coating; Optoelectronics; Thermal; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002493877,0.0001831999,0.000358888,0.00005780261,0.00005087845,0.00001734221,0.0002054395,0.00006219339,0.0001333291],"category_scores_gemma":[0.00008247516,0.0001355195,0.0001489424,0.0001846643,0.00005897322,0.00008233023,0.00003872065,0.0001990063,0.000006583903],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001392439,"about_ca_system_score_gemma":0.00001292571,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002804137,"about_ca_topic_score_gemma":6.31543e-8,"domain_scores_codex":[0.998906,0.00001112346,0.0003254425,0.0002399128,0.0002652941,0.0002522415],"domain_scores_gemma":[0.9994065,0.0001295777,0.0001950146,0.00007980812,0.00008517261,0.0001038891],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0004744262,0.0001323402,0.04221235,0.0002550693,0.00005632856,8.239987e-7,0.0008448365,0.000007140367,0.4084496,0.4371436,0.0005951953,0.1098283],"study_design_scores_gemma":[0.0006345573,0.001350285,0.003412868,0.0001548727,0.00003169909,3.870633e-7,0.00009823347,0.0008108462,0.9838629,0.009245913,0.0002281282,0.0001692591],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9919258,0.00001894717,0.00001672419,0.00009476603,0.00004854772,0.000196088,0.000008634425,0.00002133433,0.007669142],"genre_scores_gemma":[0.9996008,4.633504e-7,0.0001594585,0.00006211893,0.0000810637,0.000004611525,0.000004143955,0.00001108407,0.00007621569],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.5754133,"threshold_uncertainty_score":0.5526324,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005395964818251445,"score_gpt":0.250900003434326,"score_spread":0.2455040386160746,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}