{"id":"W2063170916","doi":"10.1109/drc.2009.5354935","title":"Short channel vertical transistors with excellent saturation characteristics","year":2009,"lang":"en","type":"article","venue":"","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"IGNIS Innovation (Canada)","funders":"","keywords":"Materials science; Optoelectronics; Dielectric; Transistor; Gate dielectric; Silicon on insulator; Plasma-enhanced chemical vapor deposition; Thin-film transistor; Chemical vapor deposition; Photolithography; Amorphous solid; Leakage (economics); Amorphous silicon; Insulator (electricity); Silicon nitride; Saturation (graph theory); Silicon; Electrical engineering; Nanotechnology; Layer (electronics); Voltage; Crystalline silicon; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006567874,0.0001692779,0.0001167011,0.0001296661,0.0001306673,0.000244511,0.0001566816,0.0002141198,0.002953686],"category_scores_gemma":[0.0001466662,0.00008125382,0.00008331144,0.0001992325,0.0001167631,0.0003139212,0.0002107621,0.000196186,0.001336981],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002023938,"about_ca_system_score_gemma":0.000130906,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003999252,"about_ca_topic_score_gemma":0.001728581,"domain_scores_codex":[0.9999399,0.000002522298,0.000002469454,0.00001045665,0.00002840944,0.00001619217],"domain_scores_gemma":[0.9999015,0.00002215062,0.00001394294,0.000008188651,0.00003439955,0.0000197694],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004607043,0.00001266111,0.0002413372,0.00006479683,0.000004258907,0.00008684969,0.00004369409,0.0001809312,0.985983,0.001334881,0.001527615,0.01047391],"study_design_scores_gemma":[0.00002767854,0.0004912182,0.003904026,0.00001793511,0.00001896397,0.0006228405,0.00007154633,0.007405586,0.9516101,0.001176258,0.03463212,0.00002180588],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.920577,0.004628203,0.02296465,0.0006494556,0.0003127835,0.00005075493,0.001479238,0.001233815,0.04810408],"genre_scores_gemma":[0.9763056,0.001016571,0.006169857,0.0001029017,0.00006205006,0.00002508182,0.0004082903,0.0000537798,0.01585586],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002953686,"threshold_uncertainty_score":0.00988102,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01013767380546413,"score_gpt":0.1919554152711665,"score_spread":0.1818177414657024,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}