{"id":"W2063320852","doi":"10.1557/opl.2012.1244","title":"The Stress and Microstructure analysis of Polycrystalline Silicon Films Deposited by LPCVD","year":2012,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Residual stress; Chemical vapor deposition; Composite material; Microstructure; Surface roughness; Nanocrystalline silicon; Grain size; Silicon; Analytical Chemistry (journal); Metallurgy; Amorphous silicon; Crystalline silicon; Nanotechnology; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007463656,0.0001550307,0.0002191384,0.0001387263,0.0000784276,0.00004239148,0.0001994244,0.0001400944,0.000008048124],"category_scores_gemma":[0.00002992355,0.000116739,0.00006057794,0.000584288,0.0001259758,0.0001535815,0.00003308218,0.0001705682,4.885707e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002351289,"about_ca_system_score_gemma":0.000001975351,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002130072,"about_ca_topic_score_gemma":0.00001863006,"domain_scores_codex":[0.9992723,0.000001951656,0.0001988236,0.0001221203,0.0001217234,0.000283093],"domain_scores_gemma":[0.9997119,0.00003045147,0.00005079833,0.0001104011,0.00004410176,0.0000523308],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001100372,0.00001183436,0.06292234,0.0001087173,0.0004442623,1.639389e-7,0.0009045067,0.00007307884,0.9325202,0.0002035689,0.00214735,0.0006530237],"study_design_scores_gemma":[0.0002891201,0.00003775018,0.09220938,0.00003762903,0.0007519323,0.000006322718,0.001540716,0.005430728,0.8956618,0.00003569875,0.00365646,0.0003424115],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9932984,0.005773601,0.00007158852,0.00008021055,0.00006690597,0.0000958271,0.00008025819,0.0003405317,0.0001927274],"genre_scores_gemma":[0.9992097,0.000199467,0.000465039,0.00001273451,0.00001375985,0.000009194802,0.00001354423,0.00002354884,0.00005300843],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03685831,"threshold_uncertainty_score":0.4760477,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003625653275144698,"score_gpt":0.1837178985918353,"score_spread":0.1800922453166906,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}