{"id":"W2063558949","doi":"10.1063/1.371839","title":"Texture of Al thin films deposited by magnetron sputtering onto epitaxial W(001)","year":2000,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"","funders":"Stiftelsen för Strategisk Forskning; Stiftelsen för Strategisk Forskning; McGill University; Strategic Research Council; U.S. Department of Energy","keywords":"Materials science; Epitaxy; Tetragonal crystal system; Sputter deposition; Electromigration; Transmission electron microscopy; Lattice constant; Lattice (music); Electron diffraction; Diffraction; Condensed matter physics; Thin film; Crystallography; Layer (electronics); Sputtering; Composite material; Crystal structure; Optics; Nanotechnology; Chemistry","routes":{"ca_aff":false,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":true},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.0002750131,0.0001527659,0.0003513258,0.00002235947,0.00005959109,0.00005168423,0.0003135765,0.00007360346,0.001566664],"category_scores_gemma":[0.000006522449,0.000114005,0.0001245644,0.00009273105,0.00008493944,0.0001551097,0.00003347169,0.0002476001,0.00004029215],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000430627,"about_ca_system_score_gemma":0.00003866989,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007716314,"about_ca_topic_score_gemma":0.000005102495,"domain_scores_codex":[0.9987193,0.00002765095,0.0005100074,0.0001667404,0.0003612825,0.0002150312],"domain_scores_gemma":[0.999237,0.0000550912,0.0003173229,0.0002090139,0.00009013143,0.0000914156],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003076614,0.0002440937,0.00003622012,0.00003116979,0.00001691267,0.000003780857,0.000432102,0.002498015,0.9768836,0.00009861036,0.01177672,0.007671043],"study_design_scores_gemma":[0.001194562,0.0004321309,0.0006008323,0.00007701623,0.00005971871,0.00002643571,0.0001416847,0.00142664,0.985072,0.001400964,0.0093218,0.0002462777],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9946169,0.00009808107,0.000203389,0.00009467002,0.0002785795,0.00009793207,0.00003199648,0.00001286968,0.004565645],"genre_scores_gemma":[0.9981236,0.00002508589,0.001164256,0.0002694907,0.0002660186,0.00000147617,0.000004212241,0.00001526078,0.0001305275],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.008188265,"threshold_uncertainty_score":0.999346,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005684454967060308,"score_gpt":0.2186227641762802,"score_spread":0.2129383092092199,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}