{"id":"W2064704889","doi":"10.1109/mwsym.2006.249391","title":"An Embedded Suspended Micromachined Solenoid Inductor","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Asylum, Migration and Integration Fund","keywords":"Solenoid; Inductor; Inductance; Materials science; Q factor; Fabrication; Plating (geology); Surface micromachining; Optoelectronics; Silicon; Substrate (aquarium); Electrical engineering; Solenoid valve; Electrical resistivity and conductivity; Engineering; Physics; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001270962,0.000222258,0.0002169572,0.0001141363,0.0001638083,0.0004347345,0.0005462642,0.0002563154,0.001151634],"category_scores_gemma":[0.000178986,0.0001746492,0.0001645735,0.0001044935,0.0001495753,0.00029821,0.0002113142,0.0002651254,0.0006751489],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003338184,"about_ca_system_score_gemma":0.0003776878,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004353653,"about_ca_topic_score_gemma":0.0009979783,"domain_scores_codex":[0.9998955,0.000006824044,0.000007355527,0.00001928414,0.00005397931,0.00001707036],"domain_scores_gemma":[0.9997774,0.00002609736,0.00004012006,0.0000368847,0.00007844946,0.0000410939],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005652125,0.00001476921,0.0002017421,0.0000435068,0.000006486132,0.0002584682,0.00003669552,0.0006579905,0.9916037,0.0005472231,0.0003039682,0.006268965],"study_design_scores_gemma":[0.00004432053,0.0003860623,0.001404183,0.000007976741,0.00001975012,0.0006648393,0.00002347154,0.01476826,0.9667745,0.0001856397,0.01569977,0.00002118082],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7352709,0.0009095593,0.2312653,0.0004200266,0.0006923997,0.0001457375,0.0007579266,0.003582872,0.02695531],"genre_scores_gemma":[0.9114819,0.0001761645,0.07642073,0.00005946484,0.00005761426,0.00002405848,0.0002153373,0.00008031028,0.01148436],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001151634,"threshold_uncertainty_score":0.003852546,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003127240813300628,"score_gpt":0.2010609186511449,"score_spread":0.1979336778378443,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}