{"id":"W2064704889","doi":"10.1109/mwsym.2006.249391","title":"An Embedded Suspended Micromachined Solenoid Inductor","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Asylum, Migration and Integration Fund","keywords":"Solenoid; Inductor; Inductance; Materials science; Q factor; Fabrication; Plating (geology); Surface micromachining; Optoelectronics; Silicon; Substrate (aquarium); Electrical engineering; Solenoid valve; Electrical resistivity and conductivity; Engineering; Physics; Resonator","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002516494,0.0001243417,0.0001131596,0.00006540953,0.000035681,0.00001939562,0.0001437086,0.00009406822,0.0001585804],"category_scores_gemma":[0.000004152464,0.0001077231,0.00002600447,0.00009797588,0.00002637643,0.0001593986,0.00001621605,0.00012132,0.0000412845],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000260003,"about_ca_system_score_gemma":0.00000406153,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004559241,"about_ca_topic_score_gemma":0.0001353976,"domain_scores_codex":[0.9994681,0.000001689166,0.0001228287,0.0001309768,0.0000574918,0.0002189195],"domain_scores_gemma":[0.9996794,0.000008104636,0.00001106459,0.0002607768,0.00001182123,0.00002883748],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000001810754,0.00001895886,0.00003188727,0.000005318787,0.000004579816,0.000004981255,0.00001306301,0.0007986276,0.9916084,0.003043398,0.001760966,0.002708016],"study_design_scores_gemma":[0.0002553476,0.00003424056,0.001231184,0.000003321195,0.000003552887,0.000006014994,0.00009181129,0.001089588,0.9826243,0.009837022,0.004602825,0.0002207718],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9716412,0.0001320959,0.002612051,0.00002685699,0.0001448475,0.0000816208,0.000003719904,0.002784271,0.02257335],"genre_scores_gemma":[0.9800803,0.00001364913,0.0190967,0.00001592904,0.0000770315,0.000008026783,0.00001331201,0.00002870931,0.00066633],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02190702,"threshold_uncertainty_score":0.439282,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003127240813300628,"score_gpt":0.2010609186511449,"score_spread":0.1979336778378443,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}