{"id":"W2064892105","doi":"10.1088/0960-1317/16/7/012","title":"Modeling of dry stiction in micro electro-mechanical systems (MEMS)","year":2006,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Adhesion, Friction, and Surface Interactions","field":"Engineering","cited_by":49,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Stiction; Asperity (geotechnical engineering); Microelectromechanical systems; Materials science; van der Waals force; Adhesion; Work (physics); Mechanics; Contact area; Composite material; Nanotechnology; Mechanical engineering; Chemistry; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002335938,0.0003839398,0.0005770365,0.0003376654,0.0003372039,0.0004940025,0.000706304,0.001310354,0.0009064638],"category_scores_gemma":[0.0006099371,0.0003505829,0.0005730821,0.0002404445,0.000576878,0.0007411139,0.0006232879,0.0005259116,0.00026299],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003813235,"about_ca_system_score_gemma":0.0005623552,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003394161,"about_ca_topic_score_gemma":0.001783775,"domain_scores_codex":[0.9998139,0.00003164759,0.000008833827,0.00002615967,0.00009537405,0.00002416922],"domain_scores_gemma":[0.9998716,0.00005507499,0.00002420227,0.00001421729,0.00002391364,0.00001096628],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00001391428,0.00001266494,0.000299712,0.00004531141,0.0000106859,0.0001396445,0.00005347856,0.9779775,0.01092256,0.005195416,0.0002725803,0.005056466],"study_design_scores_gemma":[0.000002077749,0.00001013774,0.0001081928,0.000002197799,0.000001570765,0.00001942892,0.00000420177,0.9980578,0.0006039813,0.0007722313,0.0004154605,0.000002675271],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.0848109,0.001014817,0.904986,0.0002519475,0.00007545087,0.00006801529,0.0001338179,0.0003246797,0.008334441],"genre_scores_gemma":[0.944374,0.001419691,0.0443101,0.00008885508,0.00005309905,0.0001763,0.000215212,0.00007781746,0.009284901],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003394161,"threshold_uncertainty_score":0.006748796,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004595229093937649,"score_gpt":0.1802629618244686,"score_spread":0.175667732730531,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}