{"id":"W2065411266","doi":"10.1063/1.1935128","title":"Electrical characterization of 5 keV phosphorous implants in silicon","year":2005,"lang":"en","type":"article","venue":"Journal of Applied Physics","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Western University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Van der Pauw method; Annealing (glass); Materials science; Silicon; Hall effect; Amorphous solid; Epitaxy; Analytical Chemistry (journal); Wafer; Dissolution; Ion implantation; Oxide; Sheet resistance; Electrical resistivity and conductivity; Optoelectronics; Metallurgy; Nanotechnology; Chemistry; Crystallography; Layer (electronics); Ion","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006588652,0.00007751752,0.0002059988,0.00007084874,0.000007484394,0.000007105264,0.0001161604,0.00007268369,0.000005859952],"category_scores_gemma":[0.00000380468,0.00007266465,0.00004168639,0.0001915652,0.00001383335,0.00007802013,0.000009443603,0.0002267759,0.000005131271],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000514881,"about_ca_system_score_gemma":0.00001304191,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":5.085031e-7,"about_ca_topic_score_gemma":6.740111e-7,"domain_scores_codex":[0.9994318,0.000003206205,0.0002905251,0.00004422746,0.0001122255,0.000117944],"domain_scores_gemma":[0.9997573,0.00001786097,0.0001038839,0.00007896276,0.00001949574,0.00002242005],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000030455,0.00005793959,0.0007405531,0.00001250589,0.00001821079,0.000002441952,0.0001984653,0.009243169,0.9018216,0.0007879426,0.00004561783,0.08704115],"study_design_scores_gemma":[0.000440519,0.00003901045,0.01133803,0.00001376132,0.000008355718,0.00000886616,0.00002988969,0.01866033,0.9680887,0.0005576932,0.0007240757,0.00009070121],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9980593,0.00006850724,0.0006598599,0.000007211866,0.00005358303,0.00004852406,0.000001776598,0.00003427307,0.001067009],"genre_scores_gemma":[0.9993785,0.0002386542,0.0002447923,0.00001900511,0.0001005265,0.000001289054,0.000001954977,0.00001228652,0.000002993594],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.08695045,"threshold_uncertainty_score":0.2963178,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006988521921253401,"score_gpt":0.1989589881176333,"score_spread":0.1919704661963799,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}