{"id":"W2066128161","doi":"10.1117/12.708253","title":"Study on a symmetrically supported electrostatic actuated micro-platform","year":2006,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Actuator; Microelectromechanical systems; Sensitivity (control systems); Voltage; Displacement (psychology); Computer science; Process (computing); Repeatability; Materials science; Mechanical engineering; Electronic engineering; Optoelectronics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008843303,0.0002551579,0.0002312583,0.00009589973,0.0001992671,0.0003177186,0.000529254,0.0004093483,0.001176324],"category_scores_gemma":[0.0002013442,0.0001705718,0.00026374,0.00006035536,0.0002581324,0.0002893887,0.0002625858,0.0001748438,0.0003947865],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001525763,"about_ca_system_score_gemma":0.0003465758,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005471885,"about_ca_topic_score_gemma":0.0003930426,"domain_scores_codex":[0.9998922,0.000008645882,0.000003403959,0.00003225794,0.00004881289,0.00001453404],"domain_scores_gemma":[0.9999298,0.00001322769,0.00001820153,0.00001133644,0.00001977627,0.000007595171],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006887506,0.00003552691,0.000443525,0.0001802419,0.00002126763,0.0006816102,0.00008016704,0.07472073,0.9036206,0.006613034,0.0002027716,0.01333177],"study_design_scores_gemma":[0.00005111539,0.0009798794,0.002712606,0.00002434103,0.00004255044,0.0004626313,0.00008677327,0.6706714,0.31587,0.001368913,0.00768116,0.00004855957],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7650003,0.0009428477,0.2211211,0.0001994953,0.0001349311,0.0001247876,0.0001067049,0.0003047171,0.01206504],"genre_scores_gemma":[0.9666031,0.0003934455,0.02930236,0.00002838072,0.0000141581,0.00005023841,0.00005122898,0.00001498912,0.003542054],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001176324,"threshold_uncertainty_score":0.003935218,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01106452212427663,"score_gpt":0.2302107896221807,"score_spread":0.2191462674979041,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}