{"id":"W2066608618","doi":"10.1109/apmc.2007.4554572","title":"Novel Beam Design for Compact RF MEMS Series Switches","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Cantilever; Insertion loss; Microelectromechanical systems; Materials science; Return loss; Fabrication; Surface micromachining; RF switch; Beam (structure); Radio frequency; Voltage; Optoelectronics; Electrical engineering; Optics; Engineering; Physics; Antenna (radio)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002086383,0.0004710765,0.0002359205,0.0002794991,0.0003142438,0.0004717476,0.0006613514,0.0005670573,0.006974412],"category_scores_gemma":[0.0002113035,0.0003008494,0.0002153897,0.0002687456,0.0002090054,0.0005413644,0.0004604909,0.0002957157,0.0012102],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003025701,"about_ca_system_score_gemma":0.000213073,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001824318,"about_ca_topic_score_gemma":0.00039119,"domain_scores_codex":[0.9998916,0.00001390149,0.000007200763,0.00002674505,0.00004462572,0.00001592363],"domain_scores_gemma":[0.999866,0.00003762901,0.00002835764,0.0000175102,0.00003726958,0.00001319649],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001256941,0.00002863232,0.0004370826,0.0001045178,0.00002033619,0.000112966,0.0000693792,0.001617052,0.9541699,0.01007444,0.001082057,0.03215789],"study_design_scores_gemma":[0.0001562041,0.0006878904,0.001938528,0.00004448372,0.00005872523,0.001125755,0.00009088795,0.04702552,0.8909774,0.003373754,0.05446469,0.00005597896],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2439895,0.001992506,0.725471,0.000644048,0.0004016027,0.0002747563,0.0004597167,0.001784153,0.02498262],"genre_scores_gemma":[0.6194032,0.001338454,0.3661393,0.0003921579,0.0001897106,0.0004022391,0.0003382776,0.000220877,0.01157577],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.006974412,"threshold_uncertainty_score":0.0233317,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03759825787154045,"score_gpt":0.2582118399944721,"score_spread":0.2206135821229316,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}