{"id":"W2066608618","doi":"10.1109/apmc.2007.4554572","title":"Novel Beam Design for Compact RF MEMS Series Switches","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Cantilever; Insertion loss; Microelectromechanical systems; Materials science; Return loss; Fabrication; Surface micromachining; RF switch; Beam (structure); Radio frequency; Voltage; Optoelectronics; Electrical engineering; Optics; Engineering; Physics; Antenna (radio)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001173016,0.0001173991,0.000130018,0.00005732652,0.00004561659,0.0000128895,0.0001001869,0.00008263967,0.0000113889],"category_scores_gemma":[0.00003420355,0.0000979992,0.00003679803,0.00008940008,0.00003308018,0.0001512709,0.00001071261,0.00007048321,0.00000695892],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000306325,"about_ca_system_score_gemma":0.000004166793,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000007383052,"about_ca_topic_score_gemma":0.00003259538,"domain_scores_codex":[0.999457,1.156916e-7,0.0001264698,0.00009659989,0.00005161981,0.0002681636],"domain_scores_gemma":[0.9996974,0.00009257581,0.00001305659,0.0001426595,0.00002022135,0.00003410691],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001489183,0.00001099025,0.00001037488,0.0000193694,0.00001805377,6.576791e-7,0.00003094161,0.006996694,0.9850984,0.0009829175,0.002224899,0.004591853],"study_design_scores_gemma":[0.0001981421,0.00006267108,0.0003201526,0.000007648562,0.000004420839,0.000007045852,0.0002764863,0.0002013235,0.9749616,0.002264237,0.02154406,0.0001521556],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.08089296,0.0001739741,0.9139631,0.00006630757,0.0001764394,0.0002115786,0.000004263984,0.001486628,0.003024801],"genre_scores_gemma":[0.8363693,0.00006348965,0.1623605,0.00003142483,0.00007229261,0.00001463797,0.000002847923,0.00003841911,0.001047021],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.7554764,"threshold_uncertainty_score":0.3996291,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03759825787154045,"score_gpt":0.2582118399944721,"score_spread":0.2206135821229316,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}