{"id":"W2066612011","doi":"10.1016/j.tsf.2007.12.156","title":"Mechanical and optical properties of quaternary Si–B–C–N films prepared by reactive magnetron sputtering","year":2008,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":24,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada; Ministerstvo Školství, Mládeže a Tělovýchovy","keywords":"Materials science; Sputter deposition; Substrate (aquarium); Amorphous solid; Silicon; Sputtering; Analytical Chemistry (journal); Argon; Thin film; Boron; Surface roughness; Composite material; Mineralogy; Crystallography; Metallurgy; Nanotechnology; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001949567,0.0002455044,0.0003974391,0.00005173274,0.00006533514,0.00001760164,0.0001805635,0.0001633514,0.0001216924],"category_scores_gemma":[0.0000357036,0.0002126043,0.00007201758,0.00008849514,0.00008383099,0.000200058,0.0001431709,0.0002819342,0.00003266456],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002092116,"about_ca_system_score_gemma":0.00001474137,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000518578,"about_ca_topic_score_gemma":0.000001815029,"domain_scores_codex":[0.9987084,0.00002909411,0.0003849584,0.0002704003,0.0002784254,0.0003287644],"domain_scores_gemma":[0.9994719,0.00001696681,0.00005367415,0.000285286,0.0000352027,0.0001369848],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006389543,0.00006282167,0.00003317147,0.0001699654,0.00007559302,0.00003185954,0.001217812,0.0002138092,0.9933297,0.0005230046,0.003919074,0.0003592713],"study_design_scores_gemma":[0.0003994554,0.0002174765,0.0001094091,0.0001012538,0.00003002654,0.0001329905,0.0001832438,0.1566984,0.8410778,0.000325524,0.0004144015,0.0003099575],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9948021,0.0007735366,0.0007581307,0.00003262446,0.0005706644,0.0002271448,0.00002542817,0.0002583298,0.002552113],"genre_scores_gemma":[0.9952333,0.000264925,0.003301846,0.00003567978,0.00004379739,0.00002484834,0.0000109077,0.00005090884,0.001033805],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1564846,"threshold_uncertainty_score":0.8669754,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01978397718817479,"score_gpt":0.2074708693288686,"score_spread":0.1876868921406938,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}