{"id":"W2066712831","doi":"10.1109/tdmr.2014.2343793","title":"Adhesion Investigation Between Metal and Benzocyclobutene (BCB) Polymer Dielectric Materials in 3-D Integration Applications","year":2014,"lang":"en","type":"article","venue":"IEEE Transactions on Device and Materials Reliability","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"National Chung-Hsing University; Ministry of Science and Technology, Taiwan; National Chiao Tung University; University of Texas at Austin","keywords":"Benzocyclobutene; Materials science; Adhesion; Titanium; Polymer; Layer (electronics); Copper; Composite material; Metal; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001386639,0.0002697141,0.0002141763,0.0002819475,0.0003212907,0.0003173275,0.0002721123,0.0003675107,0.0007550407],"category_scores_gemma":[0.0002744102,0.0002015217,0.000194567,0.0003036119,0.000138377,0.0003287491,0.0002986789,0.0002852809,0.0001983419],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002522466,"about_ca_system_score_gemma":0.0001319314,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009625033,"about_ca_topic_score_gemma":0.001682499,"domain_scores_codex":[0.9998072,0.00001445488,0.000006365796,0.00003351585,0.00009455525,0.00004399849],"domain_scores_gemma":[0.9998786,0.00002914875,0.00003546938,0.000007275605,0.00003434415,0.00001508647],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003146319,0.00001048395,0.0005939745,0.00008817922,0.000008713158,0.00007800253,0.00003351978,0.0002235152,0.9964858,0.00005680198,0.00003133742,0.002358229],"study_design_scores_gemma":[0.000004248657,0.0002195447,0.01182354,0.000008070904,0.00003222901,0.0001633789,0.0001225121,0.003202636,0.9829207,0.00003347978,0.001460883,0.000008807612],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9951126,0.001645189,0.00197031,0.00003367428,0.00001825396,0.000009391263,0.00003516336,0.0000180175,0.001157293],"genre_scores_gemma":[0.9968925,0.0007966727,0.001583186,0.00001983747,0.000006834283,0.000008110101,0.000038145,0.000004874409,0.0006498497],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009625033,"threshold_uncertainty_score":0.002525866,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01464923673490376,"score_gpt":0.2473663234661212,"score_spread":0.2327170867312174,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}