{"id":"W2066821669","doi":"10.1016/j.mejo.2012.07.006","title":"Characterization of the thermal conductivity of insulating thin films by scanning thermal microscopy","year":2012,"lang":"en","type":"article","venue":"Microelectronics Journal","topic":"Thermal properties of materials","field":"Materials Science","cited_by":31,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Sherbrooke","funders":"Institut National des Sciences Appliquées de Lyon","keywords":"Scanning thermal microscopy; Materials science; Thermal conductivity; Microelectronics; Silicon; Porous silicon; Wafer; Irradiation; Scanning electron microscope; Characterization (materials science); Swift heavy ion; Thin film; Thermal; Conductivity; Optoelectronics; Composite material; Analytical Chemistry (journal); Nanotechnology; Chemistry; Fluence","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001747842,0.000300246,0.0002311236,0.0003948879,0.0003422174,0.0004106375,0.0003274254,0.0003436941,0.001331157],"category_scores_gemma":[0.000420998,0.0002671538,0.0001489691,0.0002596187,0.0002663227,0.0003803738,0.0001275929,0.0004905419,0.0001945701],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002769267,"about_ca_system_score_gemma":0.0001634279,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008695754,"about_ca_topic_score_gemma":0.0009820726,"domain_scores_codex":[0.999869,0.0000107548,0.000008186676,0.00003061795,0.00005349901,0.00002783957],"domain_scores_gemma":[0.9997652,0.00007368501,0.00004339537,0.00003258155,0.0000704179,0.00001468056],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002956483,0.000006830458,0.0001569022,0.00001756677,0.000002947993,0.0000260458,0.00002411863,0.00008547561,0.9988397,0.00006109884,0.00003128914,0.0007185049],"study_design_scores_gemma":[0.000003398933,0.00004113677,0.002516696,0.000004209417,0.000007529674,0.00006117821,0.0000342574,0.001790205,0.9950711,0.00002976698,0.0004367769,0.000003858909],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9893072,0.0006180528,0.007117517,0.00007395392,0.00002808902,0.00001978186,0.0003571917,0.0001082427,0.002370042],"genre_scores_gemma":[0.9926635,0.0003425951,0.005413526,0.00002301847,0.000008268908,0.00002932019,0.0002386875,0.00003925267,0.001241751],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001331157,"threshold_uncertainty_score":0.004453123,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0122964582001357,"score_gpt":0.2342586232873579,"score_spread":0.2219621650872222,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}