{"id":"W2066903173","doi":"10.1116/1.1424278","title":"Capacitance sensor with sub-zeptofarad (<10−21 F) sensitivity for scanning capacitance microscopy","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Manitoba","funders":"Natural Sciences and Engineering Research Council of Canada; Canadian Institute for Advanced Research","keywords":"Capacitance; Materials science; Sensitivity (control systems); Parasitic capacitance; Test fixture; Capacitance probe; Analytical Chemistry (journal); Scanning capacitance microscopy; Electrical engineering; Optoelectronics; Chemistry; Electronic engineering; Scanning electron microscope; Engineering; Composite material; Scanning confocal electron microscopy; Electrode; Chromatography","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.000789652,0.0003278076,0.000440104,0.0005400821,0.000920305,0.0002655612,0.0003053607,0.000087104,0.00001335091],"category_scores_gemma":[0.00001292466,0.0002551892,0.00006827054,0.0009439692,0.0009833709,0.000381636,0.00003587523,0.0003918674,4.083724e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001625248,"about_ca_system_score_gemma":0.0002015201,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003621814,"about_ca_topic_score_gemma":0.000005640385,"domain_scores_codex":[0.9980207,0.00002054537,0.0004391173,0.00048723,0.0003423632,0.0006900596],"domain_scores_gemma":[0.9982803,0.00002278922,0.0005995049,0.0002386371,0.0007265923,0.0001321082],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004825663,0.00004965893,0.001354478,0.00004269915,0.00005837502,6.47931e-7,0.0002790822,0.000005715116,0.974637,0.002283123,0.0001034402,0.02113754],"study_design_scores_gemma":[0.001354032,0.000922302,0.0004119581,0.0002672003,0.0002014979,0.0002168343,0.000302215,0.0004538178,0.9705809,0.01639309,0.008239374,0.0006568181],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.919897,0.00820601,0.0707441,0.0005941591,0.00005001151,0.0003356667,0.0000234091,0.00003597224,0.0001137351],"genre_scores_gemma":[0.9675004,0.0001282129,0.03211477,0.00005034385,0.00009068965,0.00002266449,0.000001534073,0.0000256682,0.00006570328],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04760348,"threshold_uncertainty_score":0.99999,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01857643683614967,"score_gpt":0.2509390437325356,"score_spread":0.2323626068963859,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}