{"id":"W2067032379","doi":"10.1088/0960-1317/13/1/317","title":"Micromachined III V cantilevers for AFM-tracking scanning Hall probe microscopy","year":2002,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":27,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nortel (Canada)","funders":"","keywords":"Cantilever; Piezoresistive effect; Hall effect sensor; Fabrication; Materials science; Magnetic force microscope; Optoelectronics; Nanotechnology; Deflection (physics); Hall effect; Scanning probe microscopy; Scanning Hall probe microscope; Atomic force microscopy; Scanning electron microscope; Magnet; Magnetic field; Optics; Magnetization; Electrical engineering; Composite material; Physics; Electrical resistivity and conductivity; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0002355498,0.000269638,0.0003954949,0.0001930325,0.0001986641,0.0001386089,0.0002566922,0.00007203024,0.00007710928],"category_scores_gemma":[0.000005531807,0.0002659466,0.0002196875,0.0001542938,0.00002753424,0.0001888119,0.00006562567,0.0002899881,0.000002077702],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005228808,"about_ca_system_score_gemma":0.00002445566,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004491078,"about_ca_topic_score_gemma":0.000001493257,"domain_scores_codex":[0.9986973,0.000008704674,0.0005669626,0.0002288925,0.00008838202,0.000409763],"domain_scores_gemma":[0.9991064,0.00003969308,0.0003686856,0.0001698685,0.0001747624,0.0001405907],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001289247,0.00006231163,0.00008738799,0.00005033307,0.00008351532,0.000002137071,0.00030435,0.00006509301,0.9877031,0.002832489,0.002494445,0.006301979],"study_design_scores_gemma":[0.001893531,0.000233658,0.00003984895,0.0004371758,0.0001535461,0.0001721433,0.0003573653,0.00788741,0.9444966,0.001367237,0.04240919,0.0005523207],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4580309,0.001666344,0.5391374,0.0002456862,0.000275639,0.0004155719,0.00008166028,0.00004090269,0.0001058693],"genre_scores_gemma":[0.9239175,0.0001409954,0.07521575,0.00005775061,0.0002389528,0.00001925324,0.000009729149,0.0000635307,0.0003365136],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.4658866,"threshold_uncertainty_score":0.9999793,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01017771469243998,"score_gpt":0.2433025518132158,"score_spread":0.2331248371207758,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}