{"id":"W2067320359","doi":"10.1116/1.2764082","title":"Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films","year":2007,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":892,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Materials science; Nucleation; Nanotechnology; Thin film; Fabrication; Deposition (geology); Microstructure; Chemical vapor deposition; Substrate (aquarium); Nanoscopic scale; Porosity; Planar; Physical vapor deposition; Composite material; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001382326,0.00014704,0.0003089606,0.0003761887,0.0004747419,0.0001209029,0.0003433317,0.000148164,0.00001579881],"category_scores_gemma":[0.0001636016,0.0001050362,0.00002696323,0.000899456,0.001398078,0.0004695378,0.0001931506,0.0002246306,8.890475e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001808262,"about_ca_system_score_gemma":0.0001020558,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0000236966,"about_ca_topic_score_gemma":0.000009409136,"domain_scores_codex":[0.9984862,0.00001695369,0.0005861075,0.0003012645,0.0002960373,0.0003134052],"domain_scores_gemma":[0.998561,0.00006459393,0.0005604718,0.0001805157,0.0005004432,0.0001329395],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002422901,0.00002825949,0.009863272,0.00003548164,0.000004510481,0.000002884459,0.0004176502,0.000004177566,0.9865716,0.001232794,0.0000387125,0.001776449],"study_design_scores_gemma":[0.00038251,0.0004224448,0.02236776,0.000111493,0.00003406567,0.0004433152,0.002110971,0.0004436005,0.9705703,0.002690725,0.0002446425,0.0001781966],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9930838,0.003199662,0.002597241,0.0007292292,0.0001079016,0.0001857639,0.000008754416,0.00002886522,0.00005874585],"genre_scores_gemma":[0.9434555,0.0001331058,0.05628074,0.00006597641,0.00001974134,0.000003637382,4.04852e-7,0.000006793234,0.00003407436],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05368349,"threshold_uncertainty_score":0.5151277,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008609728143575466,"score_gpt":0.229264730992818,"score_spread":0.2206550028492425,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}