{"id":"W2067399754","doi":"10.1007/s00339-008-4551-x","title":"High-resolution X-ray imaging—a powerful nondestructive technique for applications in semiconductor industry","year":2008,"lang":"en","type":"article","venue":"Applied Physics A","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":57,"is_retracted":false,"has_abstract":false,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Synchrotron radiation; Synchrotron; Optics; Zone plate; Materials science; Fresnel zone; Image resolution; Microscope; Electromigration; Chip; Optoelectronics; Diffraction; Physics; Electrical engineering; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004378878,0.0003411856,0.0004003545,0.0004257139,0.000242795,0.0006603024,0.0007005942,0.0005030041,0.002360739],"category_scores_gemma":[0.0004223837,0.0004092757,0.0001884189,0.0004649737,0.0005993325,0.001466523,0.0005479303,0.0008962456,0.0008841702],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000233057,"about_ca_system_score_gemma":0.0002764276,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002721593,"about_ca_topic_score_gemma":0.0003951894,"domain_scores_codex":[0.9997402,0.00002595873,0.00001125419,0.0000477182,0.0001562669,0.00001873675],"domain_scores_gemma":[0.9997897,0.00007093552,0.00003877967,0.00004678114,0.00003360985,0.00002031277],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009675909,0.00001928433,0.0003740533,0.0003445733,0.00001451249,0.000115388,0.00007427725,0.0003529354,0.9244916,0.006725646,0.002337392,0.0650535],"study_design_scores_gemma":[0.00003044106,0.0001677954,0.001949388,0.00004297441,0.00003221797,0.001152569,0.00005804448,0.005803759,0.9282465,0.001851617,0.06063339,0.00003134303],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1832267,0.1138179,0.6432835,0.004106736,0.001002028,0.0003229992,0.0009152401,0.002598488,0.05072632],"genre_scores_gemma":[0.5381263,0.02954225,0.4060644,0.00100698,0.0004736209,0.00009323169,0.0004968069,0.0002337075,0.02396272],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002360739,"threshold_uncertainty_score":0.007897437,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009597774548924305,"score_gpt":0.2407613828193403,"score_spread":0.231163608270416,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}