{"id":"W2067581414","doi":"10.1116/1.582168","title":"Residual strain and resultant postrelease deflection of surface micromachined structures","year":2000,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"","keywords":"Residual stress; Materials science; Composite material; Deflection (physics); Microstructure; Structural engineering; Optics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000422175,0.0002207188,0.0004021942,0.0005552808,0.00020444,0.00004169094,0.0003925147,0.0002514032,0.000029134],"category_scores_gemma":[0.00007433238,0.0001734146,0.00004223488,0.001107865,0.001081065,0.0004374993,0.00007594032,0.000523915,6.591152e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003092229,"about_ca_system_score_gemma":0.00006677313,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001575636,"about_ca_topic_score_gemma":0.00001350789,"domain_scores_codex":[0.9985932,0.000009091003,0.0005204746,0.0002497277,0.0002520515,0.0003754655],"domain_scores_gemma":[0.9992842,0.00005362326,0.0002006534,0.0002272724,0.0001379209,0.00009629686],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006120578,0.00001963868,0.0007486018,0.00002386354,0.00002563727,0.00002212753,0.000140641,0.001783266,0.9781738,0.0003904574,0.00005836319,0.01855241],"study_design_scores_gemma":[0.001182125,0.001071861,0.02109049,0.0001330899,0.0000568092,0.001063187,0.001689862,0.002072861,0.9551369,0.01512156,0.0009767956,0.0004044925],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9945146,0.004342062,0.0001198384,0.0005087461,0.0001315859,0.0001018352,0.00003653874,0.000159403,0.00008540531],"genre_scores_gemma":[0.9791187,0.004086795,0.01671664,0.0000104211,0.00001204915,7.606037e-7,5.311903e-7,0.00001523901,0.00003886364],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02303692,"threshold_uncertainty_score":0.7071642,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004791305877747449,"score_gpt":0.2272464732685258,"score_spread":0.2224551673907784,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}