{"id":"W2067868202","doi":"10.1007/s00542-010-1075-z","title":"Electropolishing as a method for deburring high aspect ratio nickel RF MEMS","year":2010,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Electronic Packaging and Soldering Technologies","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"Electropolishing; Electroforming; Microelectromechanical systems; Electroplating; Materials science; Lapping; Resist; LIGA; Lithography; Optoelectronics; Metallurgy; Layer (electronics); Fabrication; Composite material; Chemistry; Electrolyte","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002004555,0.0002787343,0.00029172,0.0003206417,0.0003771558,0.0003150823,0.0003629463,0.0003125008,0.00128996],"category_scores_gemma":[0.000363669,0.0003053795,0.0001771751,0.0002583023,0.000405967,0.0005424995,0.0003041049,0.000481306,0.0004126787],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002287188,"about_ca_system_score_gemma":0.0001904228,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000463305,"about_ca_topic_score_gemma":0.001660183,"domain_scores_codex":[0.9997968,0.00001485691,0.00001284778,0.00003835605,0.0001072009,0.00002996573],"domain_scores_gemma":[0.9998699,0.00002587095,0.00003283129,0.00003350757,0.00002997096,0.000007925036],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004322976,0.00001284191,0.0001402414,0.00007637826,0.000003822031,0.0001000931,0.00008684886,0.000113595,0.9891948,0.0003120481,0.0001574166,0.009758695],"study_design_scores_gemma":[0.000004395986,0.0000886721,0.001154669,0.000003468095,0.000006853803,0.000237605,0.00003052083,0.0008339634,0.9939541,0.0000426877,0.003638402,0.000004674315],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9370072,0.003464907,0.04507869,0.0003046573,0.000315205,0.0001058014,0.00008145875,0.0007028994,0.01293907],"genre_scores_gemma":[0.9686081,0.0008657851,0.01822238,0.0001089056,0.00004206311,0.00002497003,0.00007084919,0.0001231945,0.01193386],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00128996,"threshold_uncertainty_score":0.004315376,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006922631373197966,"score_gpt":0.2452307854030876,"score_spread":0.2383081540298896,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}