{"id":"W2067868202","doi":"10.1007/s00542-010-1075-z","title":"Electropolishing as a method for deburring high aspect ratio nickel RF MEMS","year":2010,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Electronic Packaging and Soldering Technologies","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Saskatchewan","funders":"","keywords":"Electropolishing; Electroforming; Microelectromechanical systems; Electroplating; Materials science; Lapping; Resist; LIGA; Lithography; Optoelectronics; Metallurgy; Layer (electronics); Fabrication; Composite material; Chemistry; Electrolyte","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005538195,0.000413451,0.0005133262,0.0003929917,0.0002854131,0.0002445843,0.001058979,0.0007345328,0.000003713445],"category_scores_gemma":[0.0006362392,0.0003951455,0.0001514354,0.0004459145,0.0001236462,0.0002201524,0.0001811713,0.001199516,0.00003257671],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001737835,"about_ca_system_score_gemma":0.00006073211,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000149737,"about_ca_topic_score_gemma":0.000418663,"domain_scores_codex":[0.9978939,0.00001000563,0.0004277854,0.0005063689,0.0001743084,0.0009876091],"domain_scores_gemma":[0.9985477,0.0002673678,0.00009566396,0.0009707885,0.0000832736,0.00003521016],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004951787,0.00001106975,0.00007814223,0.000244052,0.00009391392,0.000005942645,0.00007312746,0.0002569796,0.9331266,0.04691524,0.001043036,0.01814695],"study_design_scores_gemma":[0.0003575725,0.0001005131,0.00001623301,0.0001098263,0.00003097583,0.0001401191,0.000717635,0.004212171,0.9650592,0.0192944,0.009473549,0.0004877843],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7645054,0.003714094,0.1942185,0.0009192837,0.001053385,0.0008564874,0.00001952436,0.03355544,0.001157903],"genre_scores_gemma":[0.9460629,0.0001479602,0.05302674,0.00001525913,0.00007167409,0.000383705,0.000008390083,0.0001017806,0.0001815422],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1815575,"threshold_uncertainty_score":0.99985,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006922631373197966,"score_gpt":0.2452307854030876,"score_spread":0.2383081540298896,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}