{"id":"W2068154593","doi":"10.1007/s11664-010-1342-x","title":"Recrystallization of Electrodeposited Copper Thin Films During Annealing","year":2010,"lang":"en","type":"article","venue":"Journal of Electronic Materials","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":9,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of British Columbia","funders":"","keywords":"Recrystallization (geology); Copper; Isothermal process; Annealing (glass); Materials science; Thermodynamics; Microstructure; Kinetics; Metallurgy; Thin film; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001240012,0.0002542061,0.0003119115,0.0002892684,0.0003284189,0.0003261312,0.00044387,0.0002783744,0.003195955],"category_scores_gemma":[0.0004673857,0.0003033367,0.0001348914,0.0004024185,0.0002179565,0.0002842509,0.0001188493,0.0005668852,0.0004784827],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002835477,"about_ca_system_score_gemma":0.0002151405,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003099292,"about_ca_topic_score_gemma":0.004786287,"domain_scores_codex":[0.9998642,0.000009636763,0.000008815253,0.00002668709,0.00004158548,0.00004907248],"domain_scores_gemma":[0.9998425,0.00004449264,0.00002502826,0.00003577926,0.00004147341,0.00001065035],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001817584,0.00001637564,0.0002021338,0.00009626425,0.00001191663,0.0001882576,0.0001242348,0.000176404,0.9962502,0.00008452,0.0002067535,0.002461243],"study_design_scores_gemma":[0.000007679621,0.00007557419,0.001473718,0.000004109135,0.000006835068,0.00004537374,0.00003109369,0.0002455957,0.9971583,0.00001138961,0.0009371816,0.000003056642],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9931595,0.001230165,0.00133965,0.00008079829,0.00004413296,0.00002187169,0.0002801245,0.0001499405,0.003693733],"genre_scores_gemma":[0.9948372,0.0004273209,0.001055359,0.00001795781,0.00001053554,0.00001018991,0.0003173663,0.00007595413,0.003248224],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003195955,"threshold_uncertainty_score":0.01069146,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00482495346902307,"score_gpt":0.232980607032439,"score_spread":0.2281556535634159,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}