{"id":"W2069169611","doi":"10.2494/photopolymer.21.697","title":"A Study of Photoresist Pattern Freezing for Double Imaging using 172nm VUV Flood Exposure","year":2008,"lang":"en","type":"article","venue":"Journal of Photopolymer Science and Technology","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"","keywords":"Photoresist; Resist; Materials science; Shrinkage; Nanotechnology; Composite material; Optoelectronics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001384879,0.0002977781,0.0001583023,0.0001213522,0.0002047157,0.0002577977,0.0002851077,0.0002562328,0.001453823],"category_scores_gemma":[0.0002447069,0.0001627974,0.0002077549,0.0001599816,0.0001945583,0.0002217806,0.0002142613,0.0004107123,0.000177335],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003025653,"about_ca_system_score_gemma":0.0001849822,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007344608,"about_ca_topic_score_gemma":0.0007773674,"domain_scores_codex":[0.999878,0.000008344892,0.000004320627,0.00003187893,0.00004754715,0.00002987959],"domain_scores_gemma":[0.9998515,0.00005179271,0.00003582454,0.00002089289,0.00002807506,0.00001179201],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001707102,0.000006985539,0.00009539385,0.00002912655,0.000001871476,0.00003088322,0.00003401295,0.00005282034,0.997956,0.0000524727,0.00002481544,0.001698578],"study_design_scores_gemma":[0.000003219571,0.0002118637,0.002258182,0.000004189384,0.000005721024,0.0001525059,0.00003122195,0.0005312844,0.995819,0.00002507812,0.0009528059,0.000004989804],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9901496,0.0007412956,0.007074076,0.0000641078,0.00002689605,0.0000464187,0.0001185516,0.00007946838,0.001699641],"genre_scores_gemma":[0.9891121,0.0007528941,0.007027609,0.00004615692,0.00001025013,0.00004120928,0.000211416,0.00006451637,0.002733883],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001453823,"threshold_uncertainty_score":0.004863501,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01898966913259423,"score_gpt":0.275454749074626,"score_spread":0.2564650799420318,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}