{"id":"W2069938019","doi":"10.1007/s10854-007-9230-8","title":"Optical properties of nanocrystalline silicon deposited by PECVD","year":2007,"lang":"en","type":"article","venue":"Journal of Materials Science Materials in Electronics","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":21,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Nanocrystalline silicon; Materials science; Nanocrystalline material; Silane; Analytical Chemistry (journal); Thin film; Amorphous solid; Raman spectroscopy; Silicon; Photocurrent; Amorphous silicon; Chemical vapor deposition; Absorption (acoustics); Hydrogen; Crystalline silicon; Optoelectronics; Nanotechnology; Optics; Chemistry; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.003209102,0.000224552,0.0006156961,0.0004812834,0.00005114376,0.0001170136,0.0007472676,0.0001681409,0.00002912175],"category_scores_gemma":[0.0002411205,0.0001834112,0.00004432696,0.0004990783,0.0004703726,0.000474583,0.0000595803,0.0001896206,0.000002501089],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004140161,"about_ca_system_score_gemma":0.0001634737,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001215217,"about_ca_topic_score_gemma":0.00001577346,"domain_scores_codex":[0.9971371,0.00004034325,0.001367683,0.0001761878,0.0005662343,0.0007124924],"domain_scores_gemma":[0.9991265,0.0000345703,0.000320327,0.0002451139,0.0001954368,0.00007802899],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001827865,0.00006122184,0.00002269788,0.0001389816,0.0000133463,0.00001500348,0.0001215395,0.0004974311,0.99835,0.0003577726,0.00002605483,0.0002131325],"study_design_scores_gemma":[0.0003998751,0.0003260425,0.0003201835,0.0001649462,0.0000165713,0.0001269431,0.0001063281,0.00002254576,0.9980277,0.000189824,0.0001121009,0.0001869402],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9964451,0.001750418,0.000411632,0.0000556825,0.001030681,0.0001570716,0.00001435522,0.00009181716,0.00004323735],"genre_scores_gemma":[0.9978473,0.0003713238,0.001664477,0.00001044668,0.0000658357,0.000002702015,0.000001007011,0.00003165111,0.000005238748],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002967981,"threshold_uncertainty_score":0.7479293,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007220735776796363,"score_gpt":0.2089235778371252,"score_spread":0.2017028420603289,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}