{"id":"W2070233098","doi":"10.1557/proc-1002-n05-07","title":"High Resolution Electron Beam Lithographic Deposition of Metal and Metal Oxide Films from Metal Complexes","year":2007,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Metal; Tantalum; Oxide; Substrate (aquarium); Electron beam-induced deposition; Electron-beam lithography; Deposition (geology); Zirconium; Lithography; Titanium; Chemical engineering; Nanotechnology; Optoelectronics; Metallurgy; Resist; Layer (electronics); Transmission electron microscopy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001579204,0.0002293472,0.0003803264,0.00027585,0.0002776077,0.0004290663,0.0005868031,0.0003389434,0.001485134],"category_scores_gemma":[0.0003658417,0.000392919,0.0001277493,0.0002065211,0.0002451417,0.0003368231,0.0003439849,0.0004963994,0.0004502888],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003078989,"about_ca_system_score_gemma":0.000188505,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007041791,"about_ca_topic_score_gemma":0.001847,"domain_scores_codex":[0.9998708,0.00001070689,0.00001240283,0.00002361688,0.00005315177,0.00002938165],"domain_scores_gemma":[0.9998928,0.00004001293,0.00001887155,0.00002270986,0.00001464829,0.0000109157],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006502595,0.000007485223,0.00006018933,0.00007466064,0.000004343831,0.0001081753,0.00004772665,0.00006904625,0.9970368,0.0003726332,0.00019701,0.001956775],"study_design_scores_gemma":[0.00001399107,0.00002582781,0.0007181453,0.000003893378,0.000003344735,0.00015036,0.00001899749,0.0003978465,0.9968566,0.00006581257,0.001740945,0.000004321866],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9632481,0.003003595,0.01866521,0.0004220636,0.00009824356,0.00008989476,0.0006140627,0.0005395873,0.01331912],"genre_scores_gemma":[0.967862,0.001239058,0.02225251,0.000142224,0.00001920795,0.00006120538,0.0004477239,0.000107676,0.007868463],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001485134,"threshold_uncertainty_score":0.004968286,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007086224957093989,"score_gpt":0.2278944724579233,"score_spread":0.2208082475008293,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}