{"id":"W2070620299","doi":"10.1109/iecon.2012.6389255","title":"Low voltage electrostatic actuation and angular displacement measurement of micromirror coupled with resonant drive circuit","year":2012,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Voltage; Capacitance; Electronic circuit; Materials science; Physics; Optics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001931005,0.0002546434,0.0002303665,0.000158668,0.0001753945,0.0002448754,0.0005291039,0.000401669,0.0008040082],"category_scores_gemma":[0.0004780582,0.0002182198,0.0002107004,0.0001391475,0.0003958581,0.0003456843,0.0002667489,0.000293513,0.0001809009],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005747658,"about_ca_system_score_gemma":0.0002595549,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008598177,"about_ca_topic_score_gemma":0.0009359175,"domain_scores_codex":[0.9995964,0.00004004958,0.00001609064,0.0001041832,0.0002129677,0.00003031011],"domain_scores_gemma":[0.9998422,0.00006237941,0.00003455859,0.00002585063,0.00002469285,0.00001030619],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004435707,0.00001250403,0.0002884374,0.00005662464,0.00000523397,0.00005336348,0.00004182285,0.00368334,0.989906,0.002164457,0.00005117108,0.003692727],"study_design_scores_gemma":[0.0000227243,0.0001358234,0.001141477,0.000005780178,0.000007929786,0.0001733627,0.00002517525,0.15083,0.8460224,0.0003479074,0.00126724,0.00002019295],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8028004,0.0005135915,0.1892369,0.000171945,0.00005971266,0.00005767725,0.0001415975,0.0006847204,0.00633355],"genre_scores_gemma":[0.9499984,0.0001159404,0.04885285,0.00001777762,0.000007189584,0.00001837068,0.00002637039,0.00002022806,0.0009428876],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008598177,"threshold_uncertainty_score":0.004170239,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01047678045241818,"score_gpt":0.2008646132685827,"score_spread":0.1903878328161646,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}