{"id":"W2070623790","doi":"10.1088/0022-3727/45/5/055204","title":"Hysteresis-free deposition of niobium oxide films by HiPIMS using different pulse management strategies","year":2012,"lang":"en","type":"article","venue":"Journal of Physics D Applied Physics","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":85,"is_retracted":false,"has_abstract":true,"ca_institutions":"Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"High-power impulse magnetron sputtering; Materials science; Sputter deposition; Sputtering; Hysteresis; Oxide; Cavity magnetron; Niobium; Analytical Chemistry (journal); Deposition (geology); Cathode; Optoelectronics; Thin film; Nanotechnology; Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001410226,0.0002814526,0.0004640989,0.0000419855,0.00005102329,0.00004810117,0.0003255407,0.00006848782,0.00001151942],"category_scores_gemma":[0.000001240261,0.0002474342,0.0002018388,0.0001795821,0.0000274164,0.0004554334,0.0000897951,0.0002898688,0.000005307803],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00007484036,"about_ca_system_score_gemma":0.0000114304,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000003141961,"about_ca_topic_score_gemma":2.111413e-7,"domain_scores_codex":[0.9985221,0.00002317425,0.0005403793,0.0001030082,0.0004732598,0.0003380903],"domain_scores_gemma":[0.9991139,0.00002164054,0.0003701694,0.000298645,0.0000660463,0.0001295994],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003480551,0.0003789807,0.00002384219,0.000511943,0.0004055584,0.000002137615,0.0002851079,0.01715141,0.9044906,0.07113051,0.001141346,0.00444369],"study_design_scores_gemma":[0.0008868746,0.00005369851,0.0001323291,0.0001504299,0.0003631173,0.000008075504,0.0006527157,0.0135119,0.9382713,0.04552428,0.00007267291,0.0003725559],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8052685,0.0002362148,0.1913979,0.00000250096,0.0007518783,0.0001557565,0.0000310575,0.0000330576,0.002123139],"genre_scores_gemma":[0.9925327,0.00005467959,0.006922694,0.00001485871,0.0003796658,0.000005308552,0.00001463131,0.00005492713,0.0000205875],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1872642,"threshold_uncertainty_score":0.9999978,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0156877382958528,"score_gpt":0.2109621236948097,"score_spread":0.1952743853989569,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}