{"id":"W2070796203","doi":"10.1021/ar500241x","title":"Hot Wire Chemical Vapor Deposition Chemistry in the Gas Phase and on the Catalyst Surface with Organosilicon Compounds","year":2015,"lang":"en","type":"article","venue":"Accounts of Chemical Research","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":51,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Natural Sciences and Engineering Research Council of Canada; Canada Foundation for Innovation","keywords":"Organosilicon; Chemistry; Chemical vapor deposition; Catalysis; Thin film; Reactive intermediate; Chemical engineering; Organic chemistry; Nanotechnology; Materials science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001093122,0.0003488771,0.0001329582,0.0001736153,0.0001420704,0.0002531887,0.0002650331,0.0002735993,0.001653047],"category_scores_gemma":[0.00008368927,0.0001760923,0.0001939041,0.0001581778,0.0002798057,0.0002887341,0.000186413,0.0003363273,0.0004676527],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002919392,"about_ca_system_score_gemma":0.0001575755,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003526571,"about_ca_topic_score_gemma":0.0005631399,"domain_scores_codex":[0.9999064,0.00000923703,0.000004854523,0.00002707047,0.00003134858,0.00002099514],"domain_scores_gemma":[0.9999559,0.00001195396,0.00001372406,0.000008015945,0.000007133447,0.000003253669],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001612077,0.000004121242,0.0001423626,0.00008043207,0.000003793235,0.00004302915,0.00001507077,0.00009604413,0.997498,0.0004803931,0.0000498527,0.001570803],"study_design_scores_gemma":[0.000001950685,0.00004078783,0.000447312,0.000002692333,0.000003962099,0.00006135463,0.000008087824,0.0004363514,0.9976276,0.00004214382,0.001326007,0.000001898034],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.970085,0.005115728,0.01456947,0.0001332152,0.00007748002,0.00003993449,0.0002601112,0.0002192875,0.009499768],"genre_scores_gemma":[0.9861701,0.002021115,0.008148796,0.0000474479,0.00002467591,0.00002977357,0.0002287239,0.00003959637,0.003289764],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001653047,"threshold_uncertainty_score":0.00553,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.05545276246976306,"score_gpt":0.3209344409549235,"score_spread":0.2654816784851605,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}